Resonator Sensor Module Using Thin-Film Acoustic Resonators
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Solution Overview
Problem
Piezoelectric resonator sensors face limitations in sensitivity due to their relatively low oscillating frequencies, which restrict their ability to detect small quantities of materials effectively, especially in applications requiring high resonant frequencies.
Innovation Solution
A resonator sensor module system that includes sensing and reference resonators with binding sites and switches, allowing for accurate measurement of binding kinetics by differentiating between the resonators' resonance characteristics, thereby enhancing sensitivity and accuracy.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional piezoelectric resonators operate at low oscillating frequencies (MHz to 100 MHz), then device complexity and manufacturing ease are maintained, but sensitivity is limited and cannot effectively detect small quantities of materials
Solution Approach 1:
The patent changes the fundamental operating parameter of the resonator by transitioning from conventional MHz-range oscillators to thin-film resonators operating at GHz-range frequencies (1 GHz and above). This parameter change in oscillating frequency directly improves sensitivity according to the Sauerbrey equation, which states that sensitivity is proportional to the square of the resonance frequency, enabling effective detection of small quantities of materials that would be undetectable at lower frequencies
2Measurement precision
If thin-film resonators operate at high resonant frequencies (1 GHz and above), then sensitivity is significantly improved for detecting small quantities of materials, but device complexity increases due to advanced fabrication requirements
Solution Approach 1:
The patent replaces conventional mechanical resonator structures with thin-film acoustic resonators that use piezoelectric materials (such as AlN or ZnO) deposited in thin layers. This substitution enables high-frequency operation (1 GHz and above) through controlled thin-film deposition processes rather than traditional mechanical design, achieving improved sensitivity while managing fabrication complexity through established semiconductor manufacturing techniques
3Measurement precision
If single resonator measurements are used, then device complexity is minimized, but measurement accuracy is reduced due to environmental factors affecting the resonance characteristics
Solution Approach 1:
The patent divides the sensing system into separate functional components: sensing resonators that interact with the analyte and reference resonators that do not. This segmentation allows differential measurements where environmental factors affecting both resonators equally can be subtracted out, leaving only the signal from analyte binding. The module interface and switches manage multiple resonators independently, achieving improved measurement accuracy through systematic separation of measurement functions
4Productivity
If multiple resonators are connected simultaneously to the measurement interface, then measurement capability is improved, but connectivity reliability decreases due to potential connection issues
Solution Approach 1:
The patent implements dynamic switching between different resonator configurations using switches in the module interface. Rather than having all resonators permanently connected, the system can dynamically select and connect only the necessary resonators (sensing or reference) to the measurement apparatus at any given time. This dynamic connection approach maintains measurement capability while improving reliability by minimizing the number of active connections and reducing potential connection failure points
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system provides improved sensitivity and accuracy in detecting small quantities of materials by utilizing high resonant frequencies and differential measurements, reducing errors from environmental factors and improving connectivity reliability.
Implementation Method 1
Piezoelectric devices such as thin film bulk acoustic resonators (TFBAR) and similar technologies like quartz crystal microbalances (QCM) have been employed as mass detectors for some time.
Implementation Method 2
One conventional way of detecting the amount of the material bound on the surface of a resonator is to operate the resonator as an oscillator at its resonant frequency. As the material being detected binds on the resonator surface, the oscillation frequency of the resonator is reduced.
Data Source
AI summary
A resonator sensor module is disclosed. The resonator sensor module includes one or more sensing resonators that includes binding sites for an analyte material; one or more reference resonators that lacks any binding sites for the analyte material; a module interface; and one or more switches each including a first position that operatively couples at least one of the one or more sensing resonators and the module interface and a second position that operatively couples at least one of the one or more reference resonators and the module interface.