Resonator Stack Layout for Accurate Multispectral Imaging

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Solution Overview

Problem

Existing solid-state imaging devices with multilayer interference filters face challenges in achieving high accuracy and mass productivity for multispectral dispersion, as they often require complex structures and materials with varying refractive indices to selectively transmit light of different wavelength bands.

Innovation Solution

A resonator structure is developed with a stacked configuration including a semiconductor layer, a first resonator, a first reflection layer, and a second resonator, where the semiconductor layer has a higher average refractive index, the first resonator has a lower average refractive index, and the first reflection layer has a higher average refractive index than the second, allowing for the transmission of specific wavelength bands while maintaining a simple structure.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If a multilayer interference filter with multiple Fabry-Perot resonator structures of different thicknesses is used to achieve multispectral dispersion, then light of multiple wavelength bands can be selectively transmitted, but the device complexity and manufacturing difficulty increase

Engineering Contradiction:
Improvemultispectral dispersion capabilityVSAvoidstructure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The imaging element is divided into multiple pixel units, each equipped with a resonator structure of different thickness. This segmentation allows different wavelength bands to be captured by different pixel groups, achieving multispectral dispersion without requiring a single complex multilayer filter structure

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the imaging element are assigned different resonator thicknesses tailored to specific wavelength bands. The first pixel group has resonators optimized for a first wavelength band, while the second pixel group has resonators optimized for a second wavelength band, allowing each region to have locally optimized optical properties

Inventive Principle:
Principle #3Local quality

2Measurement precision

If resonator structures with different thicknesses are used for different wavelength bands, then spectral selectivity is improved, but the number of layers and manufacturing steps increase

Engineering Contradiction:
Improveoptical spectrum accuracyVSAvoidmass productivity
Core Design Contradiction:
Measurement precisionVSProductivity

Solution Approach 1:

The resonator thickness parameter is varied across different pixel groups to achieve different spectral responses. By changing this single geometric parameter rather than introducing multiple different materials or complex layer structures, the patent maintains manufacturing simplicity while achieving high spectral measurement precision

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The resonator structure serves multiple functions: it acts as both the optical filtering element for wavelength selection and the structural basis for the imaging pixel. This multi-functionality eliminates the need for separate multilayer interference filter structures, thereby improving both spectral accuracy and manufacturing productivity

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Ease of manufacture

If a simple resonator structure is used, then manufacturing is easier and productivity is improved, but achieving high accuracy optical spectrum becomes difficult

Engineering Contradiction:
Improvemanufacturing simplicityVSAvoidoptical spectrum accuracy
Core Design Contradiction:
Ease of manufactureVSMeasurement precision

Solution Approach 1:

Instead of improving spectral accuracy by adding more layers in the vertical dimension, the patent transitions to the horizontal dimension by varying resonator thickness across different spatial regions (pixel groups). This dimensional shift allows high spectral accuracy to be achieved through a simple, manufacturable structure

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration enables the imaging element to achieve highly accurate optical spectra with a simple configuration, allowing for multispectral dispersion and improved manufacturing efficiency, reducing light absorption and maintaining a small number of layers.

Implementation Method 1

a resonator structure including a stacked structure that includes a semiconductor layer, a first resonator, a first reflection layer, a second resonator, a second reflection layer stacked in this order, allows light of a specific wavelength band to be transmitted therethrough

Methodology Applied
Scientific EffectInterference: Interference

Implementation Method 2

a first reflection layer, a second resonator, a second reflection layer stacked in this order

Methodology Applied
Scientific EffectReflection: Reflection

Data Source

PatentUS12140787B2Resonator structure, imaging element, and electronic apparatus
Publication Date: 2024.11.12 SONY SEMICON SOLUTIONS CORP
  • US12140787B2 patent drawing
  • US12140787B2 patent drawing
  • US12140787B2 patent drawing

AI summary

There is provided a resonator structure that obtains a highly accurate optical spectrum. The resonator structure includes a stacked structure that includes a semiconductor layer, a first resonator, a first reflection layer, a second resonator, a second reflection layer stacked in this order, allows light of a specific wavelength band to be transmitted therethrough, the semiconductor layer having a first average refractive index, the first resonator having a second average refractive index lower than the first average refractive index, and the first reflection layer having a third average refractive index higher than the second average refractive index.