Electromagnetic Wave Resonator Tuning via MEMS Actuation

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Solution Overview

Problem

Existing electromagnetic wave resonators, such as photonic crystal cavities, face challenges in tuning their resonant frequency without a significant drop in quality factor and increase in modal volume, which is crucial for high-precision applications like quantum information processing and lasers.

Innovation Solution

The apparatus consists of first, second, and third spaced apart resonator portions with actuators that adjust the width of volumes between them, allowing for precise tuning of the resonant frequency while maintaining a high quality factor and low modal volume by using micro-electro-mechanical (MEMS) actuators to move the resonator portions relative to each other.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If the resonator is tuned by adjusting the resonator structure, then the resonant frequency can be changed, but the quality factor drops severely and modal volume increases

Engineering Contradiction:
Improvetunability of resonant frequencyVSAvoidquality factor
Core Design Contradiction:
Adaptability or versatilityVSReliability

Solution Approach 1:

The resonator is divided into multiple discrete resonator portions (first, second, third portions) that can be independently adjusted. This segmentation allows selective tuning of specific regions without disrupting the entire resonator structure, thereby maintaining high quality factor while achieving frequency tuning.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The resonator portions are made dynamically adjustable through actuators that can change the width of volumes between portions. This dynamic adjustment capability enables frequency tuning while preserving the resonator's structural integrity and performance characteristics.

Inventive Principle:
Principle #15Dynamics

2Adaptability or versatility

If the resonator is tuned by adjusting the resonator structure, then the resonant frequency can be changed, but the modal volume increases undesirably

Engineering Contradiction:
Improvetunability of resonant frequencyVSAvoidmodal volume
Core Design Contradiction:
Adaptability or versatilityVSVolume of moving object

Solution Approach 1:

By segmenting the resonator into distinct portions with adjustable volumes between them, the design enables localized adjustments that affect frequency without significantly increasing the overall modal volume. The segmented structure allows precise control over the electromagnetic field distribution.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different regions of the resonator are given different functional properties through the adjustable volume sections. The volumes between resonator portions can be selectively modified to achieve desired frequency tuning while maintaining optimal modal volume characteristics in critical regions.

Inventive Principle:
Principle #3Local quality

3Measurement precision

If manufacturing precision is increased to achieve precise resonant frequency, then the resonant frequency accuracy improves, but manufacturing complexity and cost increase

Engineering Contradiction:
Improveresonant frequency precisionVSAvoidmanufacturing complexity
Core Design Contradiction:
Measurement precisionVSDevice complexity

Solution Approach 1:

Instead of relying solely on precise manufacturing to achieve the desired resonant frequency, the design incorporates dynamic adjustment mechanisms. This allows frequency precision to be achieved through post-manufacturing tuning rather than requiring extremely tight manufacturing tolerances, thereby reducing manufacturing complexity.

Inventive Principle:
Principle #15Dynamics

Solution Approach 2:

The resonant frequency is adjusted by changing physical parameters (volume widths) of the resonator portions through actuators. This parameter-based tuning approach provides a simpler alternative to achieving frequency precision through complex manufacturing processes.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach enables tuning of the resonant frequency with minimal impact on quality factor and modal volume, achieving Q>1×105 and V<0.4 (λ/n)3 for mid-IR wavelengths, suitable for high-precision integrated optics applications.

Implementation Method 1

a first actuator coupled to the first resonator portion, the second resonator portion, or both, the first actuator configured to adjust a width of the first volume

Methodology Applied
Scientific EffectMechanical Force: Mechanical Force

Data Source

PatentUS11783218B2Electromagnetic wave resonator tuning
Publication Date: 2023.10.10 THE UNIV OF BRITISH COLUMBIA
  • US11783218B2 patent drawing
  • US11783218B2 patent drawing
  • US11783218B2 patent drawing

AI summary

An apparatus for facilitating electromagnetic wave resonator tuning is disclosed, including first, second, and third spaced apart resonator portions, the second portion disposed between the first and third to form an electromagnetic wave resonator having a resonant frequency, wherein the first and second portions define a first volume therebetween and the second and third define a second volume therebetween, a first actuator coupled to the first portion, the second, or both, the first actuator configured to adjust a width of the first volume, and a second actuator coupled to the second portion, the third, or both, the second actuator configured to adjust a width of the second volume, wherein the actuators are configured to decrease the widths of the first and second volumes or increase the widths of the first and second volumes to adjust the resonant frequency of the resonator. Other apparatuses, methods, and systems are also disclosed.