Reticle Clamping Module Shielding Component Dust Isolation
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Solution Overview
Problem
In semiconductor photolithography, traditional reticle clamping and moving methods often result in contamination due to dust particles generated by automated power equipment, compromising the cleanliness and integrity of the reticle.
Innovation Solution
A high-cleanliness reticle clamping module is designed with two clamping mechanisms, each comprising a shielding component, a gripper component, and a power component. The shielding component isolates the power component from the gripper and reticle, while an optical sensing mechanism detects the presence of the reticle to prevent damage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If automated power equipment such as robotic arms is used to clamp and move the reticle, then the reticle can be handled in a standardized way, but dust particles are generated by the power equipment which contaminate the reticle
Solution Approach 1:
The clamping mechanism is divided into separate functional modules: a power component (motor) enclosed in a housing, a shielding component between the power component and reticle, and a gripper component for contact. This segmentation isolates the dust-generating power component from the reticle while maintaining automated handling capability.
Solution Approach 2:
A shielding component is introduced as an intermediary element between the power component and the reticle. This shielding component physically blocks dust particles generated by the power component from reaching the reticle, while still allowing the power component to drive the gripper for standardized handling.
2Device complexity
If the power component is directly exposed to the reticle space, then the clamping mechanism can be simplified, but dust particles from the power component directly contaminate the reticle
Solution Approach 1:
The power component is nested within a housing structure, and the shielding component is positioned between the housing and the reticle. This nested arrangement contains the dust-generating elements within a confined space while maintaining the overall simplicity of the clamping mechanism.
3Device complexity
If no shielding component is used, then the structure can be simpler, but the gripper component and reticle are affected by dust pollution from the power component
Solution Approach 1:
The shielding component can be implemented as a thin film or shell structure that effectively blocks dust particles from reaching the reticle and gripper. This thin shielding layer provides reliable protection without significantly increasing the overall device complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The module effectively isolates the power component from the reticle, reducing dust contamination and ensuring the reticle's cleanliness and safety during handling and movement.
Implementation Method 1
the optical sensing mechanism emits an optical signal from the through hole toward the reticle space
Data Source
AI summary
A high-cleanliness reticle clamping module includes: two clamping mechanisms and at least one optical sensing mechanism, the two clamping mechanisms are disposed facing each other and clamp out a reticle space, each of the two clamping mechanisms includes a shielding component, a gripper component and a power component, the shielding component is disposed on a back side of the gripper component opposite to a reticle contact surface, the power component is disposed in an accommodating space of the shielding component, and drives the shielding component and the gripper component to move back and forth, the at least one optical sensing mechanism is disposed in one of the accommodating spaces of the two clamping mechanisms for detecting whether a reticle exists in the reticle space.