Reticle End Effector Lateral Force Fixation
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Solution Overview
Problem
Current reticle handling methods in the semiconductor industry, which rely on passive counter-gravity techniques using friction and suction, are inadequate for achieving high accelerations and throughput due to limited grip force and control over reticle movement.
Innovation Solution
An end effector with at least two arms and supports configured to apply lateral or downward forces to fixate a reticle, allowing for upward force application, enabling higher accelerations and throughput by securely gripping the reticle with multiple fingers and pushers.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Force
If passive counter-gravity techniques using friction and suction are used to handle reticles, then the handling method is simple, but the grip force is limited and cannot achieve high accelerations
Solution Approach 1:
The end effector employs dynamic actuation of multiple supports (fingers) that can independently adjust their position and applied force. The gripper transitions from a static passive hold to a dynamic active grip where fingers can be actuated to apply lateral forces, enabling high acceleration handling while maintaining controlled complexity through programmable motion sequences
Solution Approach 2:
The reticle handling system is segmented into multiple independent supports (at least two fingers) attached to separate arms. Each support can be independently actuated and controlled, allowing distributed grip force application across different locations on the reticle. This segmentation enables sophisticated force control without requiring a monolithic complex mechanism
2Productivity
If passive friction-based gripping is used, then the device structure is simple, but throughput is limited due to insufficient grip force for high acceleration
Solution Approach 1:
The end effector employs dynamic actuation of multiple supports (fingers) that can independently adjust their position and applied force. The gripper transitions from a static passive hold to a dynamic active grip where fingers can be actuated to apply lateral forces, enabling high acceleration handling while maintaining controlled complexity through programmable motion sequences
Solution Approach 2:
The system combines multiple passive support elements into an active multi-finger gripper that integrates both passive structural support and active actuation mechanisms. By merging the simple passive finger structure with controlled actuation, the system achieves high grip forces necessary for high-speed reticle transfer while maintaining the simplicity of the basic support concept
3Ease of operation
If lateral or downward forces are applied to fixate the reticle, then control during handling is improved, but the mechanism becomes more complex
Solution Approach 1:
The end effector employs dynamic actuation of multiple supports (fingers) that can independently adjust their position and applied force. The gripper transitions from a static passive hold to a dynamic active grip where fingers can be actuated to apply lateral forces, enabling high acceleration handling while maintaining controlled complexity through programmable motion sequences
Solution Approach 2:
The multi-finger end effector structure serves multiple functions: it provides passive gravitational counterbalance, active lateral fixation through finger actuation, and distributed force application. This multi-functionality achieves superior control capability without proportionally increasing complexity, as the same basic finger structure accomplishes multiple handling objectives
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides a firm grip, allowing for higher acceleration and throughput in reticle handling, preventing slipping and improving control, while relying on existing movement axes and mechanisms without additional activation, thus enhancing reticle transfer efficiency.
Implementation Method 1
Current reticle handling methods in the semiconductor industry, which rely on passive counter-gravity techniques using friction and suction
Implementation Method 2
end effector is configured to handle a reticle by applying at least a lateral force or a downward force on a reticle during handling to fixate the reticle to at least two supports which are configured to apply an upwards force on the reticle
Data Source
AI summary
End effectors of reticle mechanical interface pods as well as reticle handling methods are provided, which handle the reticle by the end effector by applying a lateral force and/or a downward force on the reticle during the handling to fixate the reticle to at least two supports (e.g., at least four fingers) which are attached to at least two arms of the end effector and are configured to apply an upwards force on the reticle. Hence the reticle is fixated to the end effector and can be handled with higher accelerations and at a higher throughput than current methods. End effectors may have multiple fingers to fixate the reticle, and on more pushers may apply a downwards force to further fixate the reticle to the supports.