Quadrilateral Gripping Mechanism for Reticle Inner Pod Stability
Solution Overview
Problem
The semiconductor industry lacks effective mechanisms for securely gripping reticle inner pods during inspection, transportation, and handling to prevent damage and contamination, particularly in extreme ultraviolet lithography processes where reticle inner pods are prone to damage and contamination by dust particles.
Innovation Solution
A gripping mechanism featuring a quadrilateral frame with four gripper units, each having a first and second gripping portion forming parallel planes, with power members to adjust distance and adhesive tapes for secure gripping, capable of adapting to different sizes and shapes of reticle inner pods, preventing them from falling off or getting damaged during inspection and handling.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional gripping mechanisms are used for reticle inner pod, then the structure is simple, but the gripping stability is insufficient and the pod is prone to damage
Solution Approach 1:
The gripping mechanism is divided into four independent gripper units, each capable of gripping the reticle inner pod from a different side. Each gripper unit includes a body, first gripping portion, and second gripping portion that can independently adjust and grip, providing stable and reliable gripping while maintaining modular structure
Solution Approach 2:
The invention introduces dual gripping planes (first gripping plane and second gripping plane) that are parallel to each other, creating a three-dimensional gripping structure. This dimensional enhancement allows the gripper units to grip the pod from multiple levels, significantly improving gripping stability and preventing pod damage during handling
2Adaptability or versatility
If a fixed gripping mechanism is used, then the structure is simple, but it cannot adapt to different sizes and shapes of reticle pods
Solution Approach 1:
The gripper units incorporate power members that enable dynamic adjustment of the distance between opposite gripper units. This dynamic capability allows the mechanism to adapt to different sizes and shapes of reticle inner pods by adjusting the gripping force and position, while the modular design keeps the overall system manageable in complexity
Solution Approach 2:
The gripping mechanism is designed with universal applicability through its four adjustable gripper units that can accommodate various pod configurations. The dual gripping planes and adjustable distances enable the same mechanism to handle different sizes and shapes of reticle pods, achieving multi-functionality without requiring multiple specialized devices
3Reliability
If conventional handling methods are used, then the process is simple, but the reticle is prone to falling off and damage during transportation
Solution Approach 1:
The reticle inner pod is gripped at four separate locations by four independent gripper units, distributing the gripping force and securing the pod from multiple sides. This segmented gripping approach prevents the pod from shifting or falling during transportation while maintaining a modular and manageable mechanism structure
Solution Approach 2:
The power members pre-adjust the distance between opposite gripper units to optimal gripping positions before handling operations begin. This preliminary positioning ensures that the pod is securely held in place before transportation or turning operations, preventing falls and damage without requiring complex real-time adjustment mechanisms
Data Source
AI summary
A gripping mechanism for inspection of a reticle inner pod includes a quadrilateral frame and fourth gripper units. The four gripper units are respectively disposed at four border strips of the quadrilateral frame and are opposite in pairs. Each gripper unit has a body, a first gripping portion and a second gripper portion. The first and second gripping portions are respectively located on different positions of the body. The first gripping portions form a first gripping plane, and the second gripping portions form a second gripping plane. At least two adjacent gripper units have a power member, which is in power connection with the body so as to adjust a distance between two bodies opposite to each other. The gripping mechanism for the inspection of the reticle inner pod is capable of securely gripping the reticle inner pod during transportation or turning of reticles.