Reticle Orientation Adjustment Device for Clean Stocker
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Conventional reticle orientation adjustment mechanisms are time-consuming due to the need to transfer the reticle between the pod opener and the turntable, involving multiple steps and prolonged cycle times.
Innovation Solution
An orientation adjustment device comprising a pivot device for the placing base, a holding device that maintains the article's orientation, and a controller to adjust the relative orientation between the article and the placing base by pivoting the base without transferring the article, allowing for quicker and fewer steps in orientation adjustment.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If the conventional mechanism transfers the reticle from the pod opener to the turntable for rotation and back to the pod opener, then the reticle orientation can be adjusted, but the process becomes time-consuming and requires multiple transfer steps
Solution Approach 1:
The patent merges the reticle rotation function directly into the pod opener by integrating a rotation stage within the pod opener structure. This allows the reticle to be rotated in-place without requiring separate transfer to an external turntable, thereby eliminating transfer time while maintaining orientation adjustment capability
Solution Approach 2:
The patent segments the orientation adjustment process into independent components: the pod opener remains stationary while a rotation stage (separate modular component) provides the rotational function. This segmentation allows the rotation function to be integrated locally without requiring the entire pod opener to move or transfer the reticle to another device
2Adaptability or versatility
If the reticle is transferred between the pod opener and the turntable for orientation adjustment, then the relative orientation can be changed, but the number of process steps increases
Solution Approach 1:
The rotation stage is merged with the pod opener structure, combining the holding function and rotation function into a single integrated unit. This eliminates the need for separate transfer steps between different devices, reducing the number of process steps while maintaining the ability to adjust relative orientation
Solution Approach 2:
The pod opener is designed with multi-functionality: it not only opens pods and holds reticles but also provides rotation capability through the integrated rotation stage. This universal design eliminates the need for a separate dedicated turntable device, simplifying the overall process
Data Source
Figure 1
Figure 2
Figure 3
AI summary
A clean stocker (100) including an orientation adjustment device includes: a pivot device which pivots a placing base; a reticle carrier device (120) which holds an article without changing an orientation of the article; and a controller (180) which controls the pivot device and the reticle carrier device (120), wherein the controller (180) causes: the article to be held in a state in which the article is separate from the placing base held by the pivot device; the placing base in the state in which the article is separate therefrom to be pivoted from an initial position to an intended position; the article to be placed on the placing base which has been pivoted to the intended position; and the placing base having the article placed thereon to be pivoted from the intended position to the initial position.