Reticle Pod Baseplate Retention for Shock-Stable Positioning
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Solution Overview
Problem
Existing reticle pods lack effective movable retention features to securely position reticles during handling and transit, leading to potential damage from shocks and contamination.
Innovation Solution
Incorporation of movable reticle contacts within the reticle pod, which are actuated by latches in the pod door, allowing for secure positioning and retention of the reticle by moving the contacts towards the cover when the pod is closed.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If a reticle is held above a substrate using a reticle holder, then the reticle can be positioned for alignment, but the reticle may shift laterally or rotate during exposure due to vibrations and thermal expansion
Solution Approach 1:
The reticle pod is inserted into a recess in the reticle holder baseplate, creating a nested structure where the pod is received within the baseplate cavity. This nesting arrangement provides mechanical constraint and stability, preventing lateral shifting and rotation of the reticle while maintaining precise positioning capability.
2Ease of operation
If the reticle is held above the substrate without direct contact, then the reticle can be accessed and replaced, but there is no mechanical retention to prevent movement
Solution Approach 1:
The reticle pod is pre-assembled with the reticle before insertion into the reticle holder. The pod includes a recess that receives and retains the reticle, so that when the entire pod assembly is inserted into the baseplate recess, the reticle is already mechanically secured. This preliminary assembly maintains ease of operation while ensuring reliability.
3Stability of the object's composition
If the reticle holder uses a complex retention mechanism, then reticle stability can be improved, but the device complexity increases
Solution Approach 1:
The reticle holder is segmented into distinct functional components: a baseplate with a recess, and a reticle pod that fits into the recess. The reticle pod itself is segmented with an outer surface that engages the recess and an inner recess that holds the reticle. This segmentation provides stable retention through simple geometric interlocking rather than complex mechanical mechanisms.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution enhances the security and protection of reticles by minimizing shock-induced damage and preventing contamination, ensuring the reticle remains securely positioned during transport, storage, and processing.
Implementation Method 1
each of the one or more movable reticle contacts are retained in the baseplate via a flexible member
Data Source
Figure 1~1A
Figure 2
Figure 3
AI summary
A reticle pod includes an inner portion that includes a cover and a baseplate, and an outer portion including a pod dome and a pod door. The pod door includes a latch, and one or more movable posts that may be driven to move when the latch is operated. The baseplate includes movable reticle contacts that may be contacted by the movable posts. Contact between the movable posts and the movable reticle contacts moves the movable reticle contacts in the baseplate towards the cover. This movement can secure the reticle within the reticle pod.