Dual Reticle Pod Clamp Structure for Stable Transfer
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Solution Overview
Problem
Current dual-pod designs for reticles in photolithography use multiple dome pads that apply pressure at separate locations, which can be inefficient and may not provide adequate stability during transfer between environments.
Innovation Solution
A dual-pod system with a single dome clamp that integrates both a reticle clamp and a cover clamp, replacing multiple dome pads, allowing for improved engagement and stability by applying pressure at two locations simultaneously.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If multiple dome pads are used to apply pressure at separate locations, then the reticle can be contained, but the device complexity increases and stability during transfer is reduced
Solution Approach 1:
The patent combines multiple dome pads into a single integrated dome clamp structure that performs multiple functions simultaneously. The dome clamp includes a first contact surface for engaging the reticle and a second contact surface for engaging the inner reticle pod cover, replacing what were previously separate dome pads located at different positions. This integration reduces the number of components while maintaining the necessary pressure application points for stable reticle containment during transfer between cleanroom and vacuum environments.
2Ease of manufacture
If multiple dome pads are used at separate locations, then pressure can be applied, but the manufacturing complexity increases
Solution Approach 1:
The dome clamp integrates multiple functional elements into a single manufacturable component. Instead of assembling multiple separate dome pads at different locations, the invention provides a unified dome clamp structure with integrated contact surfaces that can be manufactured as one piece or pre-assembled unit. This reduces the number of assembly steps and simplifies the manufacturing process while achieving the same pressure distribution effect.
3Device complexity
If a single integrated dome clamp is used, then device complexity is reduced, but the ability to apply pressure at multiple locations simultaneously must be maintained
Solution Approach 1:
The dome clamp extends in multiple spatial dimensions to provide contact surfaces at different locations. The first contact surface is positioned to engage the reticle, while the second contact surface is positioned to engage the inner reticle pod cover. This multi-dimensional configuration allows the single integrated clamp to apply pressure at multiple locations simultaneously, maintaining reliability while reducing component count.
Solution Approach 2:
The dome clamp is designed as a multi-functional component that performs both reticle engagement and inner reticle pod cover engagement functions. By incorporating both contact surfaces in a single structure, the dome clamp serves multiple purposes that were previously required separate components, thereby reducing overall device complexity while maintaining pressure application effectiveness.
Data Source
AI summary
Described are containers for storing, transporting, shipping or processing fragile devices such as photomasks, reticles, and semiconductor wafers, including in particular dual containment pods that include an outer pod adapted to contain an inner reticle pod, with the inner reticle pod containing a reticle.