Reticle Storage Pod Structure for Multi-Inner-Pod Compatibility
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Solution Overview
Problem
Conventional reticle transport pods are costly, inefficient in storage, and incompatible with different inner pod designs, leading to instability during transport and long-term storage, and require complex structures that increase production costs.
Innovation Solution
A dedicated reticle storage pod with a base and cover design featuring support members, elastic hold-down mechanisms, and a simplified outer pod structure that accommodates inner pods of varying designs, ensuring stability and reducing height for efficient storage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If a conventional dual pod structure with coordinating mechanisms is used, then reticle transport stability is improved, but device complexity and production cost increase
Solution Approach 1:
The pod system is divided into independent outer pod and inner pod components with simplified individual structures. The outer pod contains hold-down mechanisms while the inner pod has support members, eliminating the need for complex coordinating mechanisms between pods. This segmentation allows each component to be simpler while maintaining overall system reliability.
Solution Approach 2:
The outer pod is designed with universal compatibility to accommodate inner pods of different mechanism designs. The hold-down mechanisms in the outer pod work with various inner pod types through standardized interfaces, making the outer pod adaptable to multiple inner pod configurations without requiring complex custom coordination mechanisms for each pair.
2Ease of operation
If conventional outer pod design with handle is used, then reticle transport is facilitated, but storage efficiency deteriorates due to increased height and occupied space
Solution Approach 1:
The handle function is extracted from the outer pod structure. Instead of integrating a protruding handle that increases height, the outer pod uses alternative transport interfaces that maintain its compact form. The hold-down mechanisms and support members provide sufficient transport capability without requiring additional height-increasing handles.
Solution Approach 2:
The transport interface is redesigned to operate in different spatial dimensions. Instead of vertical handles extending upward, the system uses horizontal or lateral engagement points that allow transport equipment to grasp the outer pod without increasing its vertical profile, enabling efficient stacked storage while maintaining ease of transport.
3Reliability
If outer pod is designed for specific inner pod compatibility, then securing mechanism effectiveness is improved, but adaptability to different inner pod designs deteriorates
Solution Approach 1:
The outer pod incorporates universal hold-down mechanisms that can interface with multiple inner pod designs. The hold-down mechanisms are designed with standardized engagement points that work with various inner pod configurations, allowing one outer pod design to securely accommodate different types of inner pods while maintaining effective securing across all combinations.
Solution Approach 2:
The outer pod uses localized hold-down mechanisms at specific positions that can adapt to different inner pod geometries. By placing hold-down points at strategic locations with appropriate pressing forces, the system achieves effective securing for various inner pod designs without requiring complete redesign of the entire pod structure for each compatibility scenario.
4Object-affected harmful factors
If conventional reticle transport pod is used for long-term storage, then particle contamination protection is improved, but storage efficiency deteriorates due to complex structure and height
Solution Approach 1:
The pod system separates the protective functions into the sealed inner pod and the structural hold-down functions in the outer pod. The inner pod maintains particle contamination protection through its sealed construction, while the outer pod provides structural support and stability during storage. This segmentation allows optimization of each component for its specific function, with the inner pod focused on contamination protection and the outer pod on structural efficiency for storage.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances storage efficiency, reduces production costs, and ensures compatibility with multiple inner pod designs while maintaining reticle stability during transport and long-term storage.
Implementation Method 1
each of the elastic hold-down mechanisms having at least one elastic arm, the elastic arms acting on the corner of the reticle
Data Source
AI summary
The present invention discloses a reticle storage pod including an outer pod which includes an outer cover and an outer base. The outer cover and the outer base can be coupled to securely accommodate one of a first inner pod and a second inner pod that are differently structured in the outer pod. The first inner pod and the second inner pod are for individually accommodating a reticle. The outer cover is provided with at least one first hold-down mechanism and at least one second hold-down mechanism, and the first hold-down mechanism and the second hold-down mechanism respectively act on a cover of the first inner pod and a cover of the second inner pod that are differently structured.