Reticle Pod Contact Surfaces Using Dissimilar Materials to Prevent Galling

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Solution Overview

Problem

Existing reticle pods suffer from particle generation and galling due to similar material contact surfaces, leading to reduced yields and damage during storage and transportation.

Innovation Solution

Utilizing dissimilar materials with a hardness difference of at least 50 Brinell hardness for contact surfaces in reticle pods, such as gold and nickel or chrome, to reduce wear and galling, thereby improving yield and reducing reticle damage.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of manufacture

If similar material contact surfaces are used in reticle pods, then manufacturing simplicity is maintained, but particle generation and galling occur leading to reduced yields

Engineering Contradiction:

Improvemanufacturing simplicityVSAvoidyield rate

Core Design Contradiction:

Ease of manufactureVSReliability

Solution Approach 1:

The patent applies different material properties at the contact surface interfaces compared to the bulk materials. Specifically, the cover contact surface is made of a softer material (e.g., gold with 25-30 HB hardness) while the baseplate contact surface is made of a harder material (e.g., nickel or chrome with 60-70 HB hardness). This local differentiation at the interface resolves the contradiction by reducing particle generation and galling through dissimilar material contact, while maintaining manufacturing feasibility through coating processes.

Inventive Principle:

Principle #3Local quality

Solution Approach 2:

The patent employs composite material construction where the reticle pod consists of multiple materials with different properties. The inner pod includes a baseplate (e.g., aluminum alloy 6061-T6) and a cover with dissimilar material contact surfaces (gold and nickel/chrome). This composite approach allows optimization of each material for its specific function, resolving the contradiction between manufacturing ease and reliability by combining materials with complementary properties.

Inventive Principle:

Principle #40Composite materials

2Adaptability or versatility

If similar material contact surfaces are used in reticle pods, then material selection flexibility is maintained, but galling and wear occur during storage and transportation

Engineering Contradiction:

Improvematerial selection flexibilityVSAvoidgalling and wear

Core Design Contradiction:

Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the material parameter (hardness) at the contact surfaces by applying coatings with different hardness values. The cover contact surface uses a softer material (gold, 25-30 HB) while the baseplate contact surface uses a harder material (nickel or chrome, 60-70 HB), creating a hardness difference of at least 50 Brinell hardness units. This parameter change at the interface prevents galling and wear during storage and transportation while maintaining flexibility in base material selection.

Inventive Principle:

Principle #35Parameter changes

3Reliability

If dissimilar materials with hardness difference of at least 50 Brinell are used at contact surfaces, then particle generation and galling are reduced, but manufacturing complexity increases

Engineering Contradiction:

Improveparticle generation reductionVSAvoidmanufacturing complexity

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent introduces coating layers as intermediary materials between the baseplate and cover. These coatings (gold on cover, nickel or chrome on baseplate) serve as mediating surfaces that prevent direct contact between the base materials and reduce particle generation. The coating process acts as an intermediary manufacturing step that, while adding complexity, provides a controlled and repeatable method to achieve the desired dissimilar material interface.

Inventive Principle:

Principle #24Intermediary (Mediator)

4Reliability

If dissimilar materials are used at contact surfaces, then reticle damage is reduced, but material cost increases

Engineering Contradiction:

Improvereticle damage reductionVSAvoidmaterial cost

Core Design Contradiction:

ReliabilityVSQuantity of substance

Solution Approach 1:

The patent applies dissimilar materials only at the specific contact surface interfaces where they are needed to prevent reticle damage, rather than using dissimilar materials throughout the entire reticle pod structure. This localized application minimizes material costs while maintaining the protective function at the critical contact points during storage and transportation.

Inventive Principle:

Principle #3Local quality

Data Source

PatentUS20250383597A1Reticle pod inner pod having dissimilar material at contact surface interfaces

Publication Date: 2025.12.18 ENTEGRIS INC

AI summary

Reticle pod inner pods include a cover and a baseplate, with the cover and the baseplate contacting one another at contact surfaces. The contact surfaces of the cover and the baseplate each include different materials. The different materials can each be metals. The different materials can differ in hardness. The difference in hardness can be 50 Brinell hardness or greater. One of the different materials can be a ductile material, having elongation at break of 25% or greater. Methods can include providing the cover and the baseplate each including a first material, and providing a second, different material at the contact surfaces of one of the cover or the baseplate.