Reticle Pod Pressing Structure for Uniform Force Positioning
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Solution Overview
Problem
Existing reticle pods in semiconductor manufacturing apply uneven forces to reticles due to single-point contact and misalignment, leading to potential damage and movement during transportation.
Innovation Solution
A reticle pod design featuring a pressing unit with a pushing surface forming surface-to-surface contact with a pressure receiving part, allowing controlled force and travel distance application, and utilizing a limiting cap to prevent excessive pressure and misalignment issues.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Device complexity
If a single-point contact method is used to press the reticle, then the structure is simple, but the force distribution becomes uneven and the reticle may be damaged
Solution Approach 1:
The patent transitions from single-point contact (0D) to surface-to-surface contact (2D) by designing the pressing element with a pressing surface that contacts the reticle over an area rather than at a single point. This dimensional change ensures uniform force distribution across the reticle surface, preventing damage while maintaining structural simplicity.
2Ease of manufacture
If assembly tolerance accumulation is not controlled, then the manufacturing process is easier, but the pressing elements become misaligned and apply uneven forces
Solution Approach 1:
The patent incorporates alignment features and tolerance compensation mechanisms in advance during the design stage. The pressing elements include guiding surfaces and positioning structures that preemptively compensate for assembly tolerance accumulation, ensuring proper alignment and uniform force distribution even when manufacturing variations occur.
3Device complexity
If the reticle is not securely positioned, then the pod structure is simpler, but the reticle moves during transportation and becomes damaged
Solution Approach 1:
The patent combines multiple functions into integrated components: the pressing elements serve both as force application mechanisms and as positioning devices. The surface-to-surface contact structure simultaneously secures the reticle in position and distributes pressing forces uniformly, eliminating the need for separate positioning mechanisms while ensuring reliability during transportation.
Data Source
AI summary
A method for containing a reticle in a pod is provided. The method includes opening the pod such that a pressing element retained movably on the pod by a limiting cap moves to a first position, wherein a shoulder part of the pressing element between a pressure receiving part and a pressing part of the pressing element is spaced from the limiting cap. The method further includes placing the reticle in the pod such that the reticle is pressed by the pressing element.