Reticle Pod Gripping Ring for Automated Lithography Handling
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
There is a need for a safe and secure transport system for pods, such as reticle pods, in lithographic apparatuses, as manual loading is no longer feasible due to new designs and size considerations, and automated handling is required.
Innovation Solution
A handling system and method for transporting reticle pods, including a gripping ring that grips a flange of the pod, with a ring lip corresponding to the flange's exterior profile, and a moving apparatus that moves the base in response to the gripping ring's engagement.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If manual loading is used for pods, then ease of operation is maintained, but automation capability deteriorates
Solution Approach 1:
The pod handling system is designed to automatically grip, transport, and place pods without human intervention. The gripping mechanism with fingers that automatically engage with the pod flange and the automated movement between load ports embody the self-service principle, allowing the system to handle pods independently
Solution Approach 2:
The patent replaces manual mechanical handling with an automated mechanical system. The gripping mechanism with actuated fingers substitutes human hands, and the automated transport system substitutes manual carrying, achieving automation while maintaining mechanical reliability
2Extent of automation
If automated handling system is implemented, then extent of automation is improved, but device complexity increases
Solution Approach 1:
The gripping mechanism is designed with universal applicability, where the same gripping fingers and flange interface can handle different pod types (reticle pods, FOUPs). This multi-functionality reduces the need for multiple specialized handling systems, thereby managing complexity while achieving automation
Solution Approach 2:
The handling system is segmented into modular components: a gripping mechanism with individual fingers, a base structure, and a moving apparatus. This segmentation allows each component to be independently optimized and maintained, managing overall system complexity through modularity
3Reliability
If gripping mechanism engages pod flange, then transport security is improved, but risk of pod drop deteriorates
Solution Approach 1:
The gripping mechanism is designed with multiple fingers that contact different points on the pod flange simultaneously, distributing the holding force. This redundant contact approach provides a safety margin, where loss of one contact point does not result in pod drop, embodying the beforehand cushioning principle
Solution Approach 2:
The system incorporates sensors that detect whether the pod is securely gripped before initiating movement. This feedback mechanism ensures that the pod is properly engaged with the gripping fingers, preventing drops during transport by verifying grip security before action
Data Source
AI summary
Systems, apparatuses, and methods are provided for transporting a reticle chamber (pod) for processing. In one example, a system for transporting the pod is disclosed. The system may include a moving apparatus, abase coupled to the moving apparatus, and a gripping ring extending from the base. In some aspects, the gripping ring grips a flange extending from the pod. The moving apparatus moves the base in response to the gripping ring gripping the flange.