Reticle Pod Quick-Release Support for Low-Particle Replacement
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Solution Overview
Problem
Existing reticle pods suffer from wear and tear of support mechanisms due to recurrent collisions, leading to particle generation and the need for frequent replacement, resulting in resource waste and increased manufacturing costs.
Innovation Solution
A reticle pod with a quick-release mechanism, featuring a support mechanism with a detachable mounting member that connects to the reticle pod via flexible legs or threaded connections, allowing for easy installation and replacement without rotating relative to the mounting seat.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the support mechanism is made detachable with quick-release mechanism, then the ease of replacement is improved and particle generation is reduced, but the device complexity increases
Solution Approach 1:
The support mechanism is divided into separate components: a mounting member with flexible legs that can be detached from the mounting seat, and a support body portion. This segmentation allows the mounting member to be quickly released and replaced without affecting the entire reticle pod structure, resolving the contradiction between ease of replacement and device complexity.
Solution Approach 2:
The mounting member is extracted as a separate replaceable component from the support mechanism. By taking out the mounting member with flexible legs as an independent element that can be detached from the mounting seat, the design enables quick replacement of worn components without complicating the overall device structure.
2Ease of operation
If the mounting member uses flexible legs with holding members, then the ease of operation for quick release is improved, but the manufacturing precision requirements increase
Solution Approach 1:
The flexible legs with holding members are designed to automatically engage with the mounting seat through elastic deformation. The flexibility provides self-aligning capability that reduces the need for high manufacturing precision, while still enabling easy manual operation for quick release and replacement.
3Loss of time
If the support mechanism is made replaceable, then the loss of time for replacement is reduced, but the device complexity increases
Solution Approach 1:
The mounting member incorporates flexible legs that can dynamically adjust during the mounting and dismounting process. This dynamic flexibility allows for quick release and reattachment operations, reducing replacement time while keeping the overall device structure relatively simple through the use of elastic deformation rather than complex mechanical fastening systems.
Data Source
AI summary
The present invention provides a reticle pod comprising a lower cover and a support mechanism. The lower cover includes a carrying surface and a plurality of securing seats distributed on the carrying surface. The support mechanism includes a supporting portion extending upward for supporting a reticle or a reticle carrier, and a securing portion opposite the supporting portion, wherein the securing portion is detachably connected with a corresponding securing seat, so that the support mechanism can be selectively installed on the lower cover.