Reticle Pod Quick-Release Supports for Wear and Particle Reduction
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Solution Overview
Problem
In the semiconductor industry, reticle pods experience wear due to recurrent collisions, leading to particle generation and hardware waste, necessitating frequent replacements and increased manufacturing costs.
Innovation Solution
A reticle pod with a quick-release mechanism featuring detachable support mechanisms that include flexible legs, threaded connections, and inclined surfaces to reduce wear and facilitate easy replacement, thereby minimizing particle generation and resource waste.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of repair
If the support mechanism is made detachable with quick-release mechanism, then the ease of replacement is improved, but the device complexity increases
Solution Approach 1:
The support mechanism is divided into separable components: a mounting member with flexible legs that can be detached from the reticle pod body. This segmentation allows the mounting member to be quickly replaced without replacing the entire reticle pod, resolving the contradiction by enabling easy replacement while keeping the overall device structure relatively simple through modular design.
Solution Approach 2:
The flexible legs incorporate elastic elements that provide dynamic cushioning during reticle placement. The legs can flex and absorb impact forces, then return to their original position. This dynamic characteristic reduces wear on the abutting surfaces while maintaining a simple mounting structure that doesn't require complex replacement mechanisms.
2Duration of action of stationary object
If the abutting surface is made wear-resistant, then the duration of action is improved, but the manufacturing precision requirements worsen
Solution Approach 1:
The flexible legs incorporate elastic elements that provide cushioning before the reticle fully contacts the abutting surface. This pre-cushioning reduces the impact force during reticle placement, minimizing wear on the abutting surface without requiring ultra-precise manufacturing tolerances. The elastic elements absorb shock while maintaining acceptable manufacturing precision standards.
Solution Approach 2:
The flexible legs change the mechanical parameters of the support system by introducing elasticity and compliance. Instead of relying solely on hard, wear-resistant materials that require high manufacturing precision, the system uses flexible materials with appropriate elastic properties. This parameter change allows for longer duration of action with relaxed manufacturing precision requirements.
3Object-generated harmful factors
If the support mechanism absorbs impact energy, then the harmful factors are reduced, but the device complexity increases
Solution Approach 1:
The flexible legs are designed to be replaceable mounting members that can be discarded after wear or damage and quickly replaced using the quick-release mechanism. This approach reduces particle generation from worn surfaces by allowing timely replacement of degraded components, while the simple replacement mechanism keeps the overall device complexity manageable through modular design.
Data Source
AI summary
The present invention provides a reticle pod comprising a lower cover and a support mechanism. The lower cover includes a carrying surface and a plurality of securing seats distributed on the carrying surface. The support mechanism includes a supporting portion extending upward for supporting a reticle or a reticle carrier, and a securing portion opposite the supporting portion, wherein the securing portion is detachably connected with a corresponding securing seat, so that the support mechanism can be selectively installed on the lower cover.