Reticle Pod Sub-Element Inspection via Height-Adjusted Coaxial Light
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Solution Overview
Problem
In advanced semiconductor lithography, particularly in EUV lithography, the sub-element of a reticle pod is more susceptible to wear and tear due to its material composition, making it difficult to pass optical inspection standards that are identical to those for the pod body, leading to potential contamination and defects.
Innovation Solution
An inspection device for a sub-element of a reticle pod, comprising a carrier platform, a light source module with a coaxial light source and height adjustment mechanism, a camera module, and a control module that adjusts the relative distance between the light source and the carrier platform, allowing for varying levels of clarity in inspection to accommodate the sub-element's sensitivity.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the same optical inspection standard is applied to both the pod body and sub-element, then the pod body can be thoroughly inspected for cleanliness, but the sub-element will fail inspection due to its material susceptibility to wear and scratches
Solution Approach 1:
The patent applies different optical inspection standards to different parts of the reticle pod. The pod body is inspected with a first optical inspection standard, while the sub-element is inspected with a second optical inspection standard that is less stringent. This local differentiation allows the inspection system to maintain high standards for critical areas while accommodating the inherent wear characteristics of sub-elements made from materials like plastic, metal, or glass.
2Object-affected harmful factors
If a stringent optical inspection standard is applied to ensure cleanliness, then contamination can be detected, but inspection time increases and sub-elements are rejected due to tolerable defects
Solution Approach 1:
The system divides the inspection process into two distinct modes: a first optical inspection mode for the pod body using a first optical inspection standard that detects contamination, and a second optical inspection mode for the sub-element using a second optical inspection standard that is less stringent. This local quality approach allows contamination detection where critical while reducing inspection time and avoiding false rejections on sub-elements where minor defects are tolerable.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables effective optical inspection of both the reticle pod body and sub-elements, reducing inspection time and ensuring cleanliness while tolerating defects on the sub-element without harming the pod, by adjusting the inspection standards based on the material characteristics.
Implementation Method 1
a light source module including a coaxial light source
Implementation Method 2
a camera module connected to the coaxial light source and having a lens facing the carrier platform
Data Source
AI summary
An inspection device for a sub-element of a reticle pod comprises a carrier platform, a light source module, a camera module and a control module. The light source module includes a coaxial light source and a height adjustment mechanism. The height adjustment mechanism is connected to at least one of the coaxial light source and the carrier platform. The camera module is connected to the coaxial light source and has a lens facing the carrier platform. The control module is signally connected to the camera module and the height adjustment mechanism. The control module controls the height adjustment mechanism to adjust a relative distance between the coaxial light source and the carrier platform. The inspection device for a sub-element of a reticle pod performs optical inspection on the sub-element of a reticle pod.