Reticle Pod Supporting Pieces for Vibration Damping
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Solution Overview
Problem
The existing reticle pods used in semiconductor processes face challenges in preventing static electricity damage and vibration-induced damage to photomasks due to direct contact with supporting pieces and inadequate cleanliness, leading to potential contamination and displacement.
Innovation Solution
A reticle pod design featuring suspendingly disposed supporting pieces at each corner of the inner surfaces of the upper and lower covers, which prop up the photomask to reduce contact area, absorb vibrations, and include fin portions for increased lateral support, integrated lock-fasteners for simplicity, and a sealed ring for air tightness, allowing easy opening and closing, and protruding edges for stackability.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Stability of the object's composition
If supporting pieces are disposed in the reticle pod to support the photomask, then the photomask stability is improved, but static electricity damage and vibration-induced damage occur more easily
Solution Approach 1:
A cushioning layer made of static-free material is introduced as an intermediary between the supporting pieces and the photomask. This cushioning layer prevents direct contact, thereby eliminating static electricity generation while still providing mechanical support and vibration absorption to maintain photomask stability.
Solution Approach 2:
The material properties of the cushioning layer are specifically selected to have low static electricity generation characteristics and appropriate elasticity. By changing the material parameters (static-free property, cushioning capability), the system achieves both support function and protection against harmful factors.
2Stability of the object's composition
If the supporting pieces are in direct contact with the photomask for support, then the photomask is securely held, but friction generates static electricity that damages the photomask
Solution Approach 1:
The cushioning layer serves as a mediator that separates the supporting pieces from the photomask surface. This intermediary layer eliminates direct friction contact, preventing static electricity generation while still enabling the supporting pieces to hold the photomask securely through the cushioning medium.
3Device complexity
If the reticle pod structure is simplified with integrated components, then manufacturing complexity and assembly time are reduced, but the protective function against vibration and collision may be compromised
Solution Approach 1:
The supporting pieces, lock-fasteners, and connection portions are integrated into a single molded component. This merging reduces the number of separate parts and assembly steps, simplifying manufacturing and assembly while maintaining all necessary protective functions through the unified design.
Solution Approach 2:
The integrated supporting piece performs multiple functions simultaneously: it provides mechanical support for the photomask, incorporates lock-fasteners for securing the pod cover, and includes connection portions for structural assembly. This multi-functionality maintains reliability while reducing complexity.
4Strength
If the supporting pieces are made rigid for strong support, then the photomask is firmly held, but vibration during transport causes damage or cracks
Solution Approach 1:
The cushioning layer material is selected with specific elastic properties that allow it to deform under vibration forces while maintaining support capability. This parameter optimization enables the system to absorb vibration energy rather than transmitting it directly to the photomask, preventing damage while providing firm support.
Solution Approach 2:
The cushioning layer is pre-positioned between the supporting pieces and the photomask before transport. This beforehand cushioning prepares the system to absorb and mitigate vibration shocks during transport, preventing damage before it occurs.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The design ensures stability and protection of photomasks by minimizing contact area, absorbing vibrations, and maintaining cleanliness, while reducing assembly complexity and costs, and enabling efficient storage and transportation without damage or contamination.
Implementation Method 1
the supporting pieces of which are suspendingly disposed in the reticle pod for being elastic and able to absorb the vibration generated when the reticle pod is transported to provide the photomask with a protective buffering effect
Implementation Method 2
the supporting pieces are in direct contact with the photomask and therefore friction between the supporting pieces and the photomask occur more easily and will then generate static electricity that leads to damage of the photomask
Data Source
AI summary
A reticle pod, comprising an upper cover having a first accommodating space and a lower cover having a second accommodating space, a third accommodating space being formed after the upper cover and the lower cover close together, wherein the characteristic of the reticle pad is in that: the reticle pod includes a plurality of supporting pieces respectively and suspendingly disposed at each corner of the inner surfaces of the upper cover and of the lower cover, and two ends of each of the plurality of supporting pieces are respectively connected to two neighboring sides of corner of the inner surface to form a closed sheet body and a gap is formed at the bend of the closed sheet body.