Reticle Pod Volume Adjustment Surface for EUV Contamination

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Solution Overview

Problem

Substrate containers used in EUV processing face contamination issues due to pumping effects occurring during the opening of the reticle pod, which can introduce particulate matter into the container.

Innovation Solution

Incorporating a volume adjustment surface, such as a deflectable filter, within the reticle pod that can deflect by at least 0.5 mm during separation of the cover and baseplate, reducing the internal volume and thereby suppressing pumping effects.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the reticle pod is opened rapidly to improve productivity, then the opening speed increases, but pumping effects occur that introduce contamination into the container

Engineering Contradiction:

Improveopening speedVSAvoidcontamination

Core Design Contradiction:

ProductivityVSObject-affected harmful factors

Solution Approach 1:

The volume adjustment surface is pre-positioned within the reticle pod to be deflected inward before the cover and baseplate are fully separated. This preliminary volume reduction suppresses pumping effects during the opening process, allowing rapid opening without contamination.

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The internal volume of the reticle pod is dynamically changed by deflecting the volume adjustment surface inward by at least 0.5 mm during opening. This parameter change reduces the peak pressure differential by 15% to 55%, suppressing pumping effects while maintaining opening speed.

Inventive Principle:

Principle #35Parameter changes

2Reliability

If a rigid seal is used to maintain cleanliness, then contamination is prevented, but pumping effects occur during opening that can introduce particulate matter

Engineering Contradiction:

ImprovecleanlinessVSAvoidpumping effects

Core Design Contradiction:

ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The volume adjustment surface provides a dynamic volume reduction mechanism during opening, deflecting inward by at least 0.5 mm to suppress pumping effects. This dynamic adjustment maintains the seal's cleanliness function while eliminating the harmful pumping effect.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The volume adjustment surface acts as an intermediary element between the seal and the incoming air. By deflecting inward, it creates a volume reduction that mediates the pressure differential, reducing pumping effects while allowing controlled air entry.

Inventive Principle:

Principle #24Intermediary (Mediator)

3Object-affected harmful factors

If the internal volume of the reticle pod is reduced to suppress pumping effects, then contamination is reduced, but the structural complexity increases

Engineering Contradiction:

ImprovecontaminationVSAvoidstructural complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The volume adjustment surface is implemented as a flexible or movable element that can deflect inward by at least 0.5 mm during opening. This flexible structure provides the necessary volume reduction to suppress pumping effects without requiring complex mechanical assemblies.

Inventive Principle:

Principle #30Flexible shells and thin films

Solution Approach 2:

The volume adjustment surface serves multiple functions: it maintains the seal integrity, suppresses pumping effects, and provides structural support. This multi-functionality reduces the need for additional separate components, thereby limiting the increase in structural complexity.

Inventive Principle:

Principle #6Universality (Multi-functionality)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The implementation of a deflectable filter reduces the speed of air entering the reticle pod during opening, minimizing contamination by reducing the peak pressure differential by 15% to 55% compared to standard designs.

Implementation Method 1

pumping effects occurring due to sealing of the reticle pod can be suppressed

Methodology Applied

Scientific EffectPumping effect: Pump

Implementation Method 2

peak pressure differential in the internal space during separation of the cover and the baseplate is reduced by between 15% and 55%

Methodology Applied

Scientific EffectPressure differential: Pressure Gradient

Data Source

PatentUS20250147410A1Reticle pod with air flow management feature

Publication Date: 2025.05.08 ENTEGRIS INC

AI summary

Substrate containers include a deformable surface configured to deflect into an internal space so as to reduce the volume of said internal space when the reticle pod is opened. The deformable surface can be a filter, for example a filter supported by a deformable member, a filter including a deformable member, a filter that is retained under tension in the substrate container, or a filter disposed on a deformable member.