Reticle Pod Wall Retention for Shock-Stable Reticle Handling
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Solution Overview
Problem
Existing reticle pods lack effective retention mechanisms that securely position reticles during handling and transport, exposing them to shocks and potential damage.
Innovation Solution
Incorporation of movable retention features through reticle compartment walls, which are actuated by contact with actuating surfaces to securely clamp the reticle in place, utilizing linear and rotational movements to ensure stable retention.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If movable retention features extending through reticle compartment walls are added to securely retain the reticle, then the reliability of reticle retention is improved, but the device complexity increases
Solution Approach 1:
The retention feature is nested within the reticle compartment wall structure, with the movable element integrated into the wall itself. The actuating surface is formed as part of the pod dome or pod door structure. This nesting approach allows the retention mechanism to be incorporated into existing structural elements rather than adding separate external components, thereby improving reliability while minimizing the increase in device complexity.
Solution Approach 2:
The retention feature incorporates a movable element that can transition between retracted and engaged positions. The movable portion allows the retention feature to be actuated into a position where it contacts the reticle when the pod dome and pod door are joined, providing secure retention. The dynamic capability enables the system to adapt from a non-intrusive state during assembly to a secure retention state during transport, resolving the contradiction between reliability and complexity.
2Ease of operation
If retention features are positioned to contact the reticle after pod closure, then the ease of operation during assembly is improved, but the reliability of reticle retention is worsened
Solution Approach 1:
The retention feature is pre-positioned within the reticle compartment wall structure, ready to be actuated into the retention position. The movable element is prepared in advance within the wall, and the actuating surface is pre-formed on the pod dome or pod door. When the pod components are joined, the retention feature is automatically actuated into the contact position with the reticle. This preliminary preparation ensures both ease of assembly and reliable retention, as the system transitions automatically from assembly mode to retention mode without requiring additional manual intervention.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enhances the security of reticles during handling and transport by minimizing shocks and preventing damage, ensuring proper positioning without interference from security features.
Implementation Method 1
each of the one or more retaining features includes a spring
Data Source
AI summary
A reticle pod includes an outer portion that includes a pod door and a pod dome, and an inner portion including a baseplate and a cover. One of the baseplate or the cover includes a reticle compartment wall extending towards the other of the baseplate or cover. The reticle compartment wall includes one or more retaining features. The pod door or the pod dome includes one or more actuating surfaces configured to contact the retaining features. The retaining features are configured to be moved by contact with the actuating surfaces. The retaining features may be in a position configured to secure a reticle within the inner portion of the reticle pod when the reticle pod is assembled by joining the baseplate and the cover, placing the joined baseplate and cover within the pod dome, and securing the pod door to the pod dome.