Automated Reticle Purging System for Semiconductor Fabrication

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Solution Overview

Problem

Manual inspection and purging of reticles for photomask defects and foreign particles are time-consuming and prone to errors in semiconductor fabrication, especially with larger critical dimensions where pellicles can be damaged, necessitating an automated solution.

Innovation Solution

An automated reticle purging system comprising an automated pod opener, reticle holding device, reticle transporting device, image capturing device, and purging device that automates the opening of pods, transportation, inspection, and purging of reticles using a controlled process to prevent damage and ensure thorough cleaning.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If manual inspection and purging of reticles is performed, then flexibility and adaptability are maintained, but time consumption increases and error-proneness occurs

Engineering Contradiction:

Improveinspection and purging speedVSAvoiderror rate in defect detection

Core Design Contradiction:

ProductivityVSReliability

Solution Approach 1:

The patent replaces manual mechanical inspection with an automated optical inspection system that uses imaging devices to capture and analyze reticle images, automatically detecting defects and foreign particles without human intervention, thereby eliminating human error while maintaining high speed

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Solution Approach 2:

The system enables self-inspection and self-purging where the reticle handling system automatically performs inspection and purging operations without requiring manual intervention, with the purging system automatically removing detected contaminants based on inspection results

Inventive Principle:

Principle #25Self-service

2Productivity

If automated purging system is implemented, then productivity and precision are improved, but device complexity increases

Engineering Contradiction:

Improvereticle processing throughputVSAvoidsystem configuration complexity

Core Design Contradiction:

ProductivityVSDevice complexity

Solution Approach 1:

The patent combines multiple functions (pod opening, reticle transportation, imaging/inspection, and purging) into an integrated automated system that processes reticles through a unified workflow, reducing the need for separate manual operations and simplifying overall system management despite the advanced capabilities

Inventive Principle:

Principle #5Merging (Combining)

Solution Approach 2:

The automated system performs multiple functions including inspection, purging, and handling within a single integrated platform, allowing one system to replace multiple separate processes and reducing operational complexity while maintaining high productivity

Inventive Principle:

Principle #6Universality (Multi-functionality)

3Reliability

If manual purging is performed, then system complexity is kept low, but damage risk to reticles and pellicles increases

Engineering Contradiction:

Improvereticle damage preventionVSAvoidpurging system automation level

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The system performs preliminary inspection before purging, identifying the location and nature of foreign particles, then applies targeted purging actions only where needed, preventing unnecessary contact with delicate reticle and pellicle areas while ensuring thorough contamination removal

Inventive Principle:

Principle #10Preliminary action

Solution Approach 2:

The patent replaces manual mechanical purging with an automated controlled purging system that uses precisely controlled mechanisms to remove contaminants, eliminating the unpredictable manual handling that causes damage while maintaining low overall system complexity through automation

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

Data Source

PatentUS10509420B2Reticle purging system and method thereof

Publication Date: 2019.12.17 TAIWAN SEMICONDUCTOR MANUFACTURING CO LTD

AI summary

A reticle purging system includes an automated pod opener, a reticle holding device, a reticle transporting device and at least one purging device. The reticle holding device has a reticle occupiable zone thereon. The reticle transporting device is assigned with a transportation path from the automated pod opener to the reticle holding device. The reticle occupiable zone is exposed to the purging device.