Reticle Retaining System with Charge Dissipation
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Solution Overview
Problem
In the semiconductor industry, reticles face challenges with residual charge accumulation during EUV exposure, leading to static electricity issues and potential damage from sparks, as well as dust attraction and cleaning difficulties, which impact production yield.
Innovation Solution
A reticle retaining system with an inner and outer pod configuration, utilizing a hold down pin with charge dissipation properties and elastic elements to securely hold and dissipate static charges, ensuring the reticle is kept clean and protected from static discharge.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the reticle is stored in a retaining system during EUV exposure, then the reticle is protected from ambient hazards, but static charge accumulates on the reticle surface
Solution Approach 1:
A conductive adhesive layer is introduced as an intermediary between the reticle and the retaining system base. This adhesive layer serves as a mediator that allows static charge to dissipate from the reticle surface to the retaining system, while still providing secure mechanical attachment. The conductive property of the adhesive resolves the contradiction by enabling charge transfer without compromising the protective function of the retaining system.
Solution Approach 2:
The electrical conductivity parameter of the adhesive layer is specifically optimized to enable charge dissipation. By selecting or formulating an adhesive with appropriate conductive properties, the system changes the electrical parameters of the interface between reticle and holder, allowing residual charges to be dissipated while maintaining mechanical bonding strength.
2Stability of the object's composition
If the reticle is held securely in the retaining system, then positioning stability is improved, but cleaning difficulty increases due to dust attraction from static charge
Solution Approach 1:
The conductive adhesive layer acts as an intermediary that simultaneously achieves secure positioning and facilitates cleaning. By dissipating static charge, it reduces dust attraction that would otherwise complicate cleaning operations, while its adhesive properties ensure the reticle remains securely positioned during handling and processing.
3Productivity
If the reticle is moved through the exposure apparatus, then production productivity is improved, but static discharge sparks may damage the reticle pattern
Solution Approach 1:
The conductive adhesive layer performs preliminary charge dissipation before the reticle enters the exposure apparatus. By continuously or periodically dissipating accumulated static charge during handling and positioning operations, the system prevents charge buildup that would lead to dangerous discharge sparks during subsequent high-speed movement through the exposure apparatus.
Solution Approach 2:
The conductive adhesive serves as a continuous charge dissipation pathway, mediating between the reticle and ground potential. This intermediary connection ensures that static charge is continuously managed during the dynamic operations of moving the reticle through the exposure apparatus, preventing sudden discharge events that could damage the delicate pattern.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The system effectively dissipates static charges and securely retains reticles, preventing damage from sparks and dust attraction, thereby enhancing production yield and maintaining the cleanliness of the reticles.
Implementation Method 1
a hold down pin with charge dissipation properties and elastic elements to securely hold
Implementation Method 2
hold down pin with charge dissipation properties
Data Source
AI summary
A reticle retaining system including an inner pod and an outer pod is described. The inner pod includes an inner base configured to receive a workpiece; an inner cover configured to couple to the inner base, thereby forming an interior for housing the workpiece; and a hold down pin movably arranged through the inner cover and configured to press the workpiece. The outer pod includes an outer base configured to receive the inner base, an outer cover configured to couple to the outer base, and a pushing element arranged on the outer cover. The hold down pin, the outer cover and the pushing element have a charge dissipation property. When the pushing element pushes the hold down pin to press the workpiece, a charge dissipation path is established from the received workpiece, through the hold down pin and the pushing element, to the outer cover.