Reticle Shield Assembly for Contaminant Interception
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Solution Overview
Problem
Contaminants on reticles in semiconductor processing exposure apparatuses can degrade the quality of images transferred to semiconductor wafers, compromising the integrity of the reticle and the manufacturing process.
Innovation Solution
A device container assembly that includes a shield assembly positioned between the fluid port and the reticle, which inhibits contaminants from being deposited on the reticle, and a filter system to purify the fluid flowing through the container, maintaining the reticle's integrity during pressure changes and storage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Ease of operation
If a fluid port is provided in the device container to allow fluid flow for pressure changes, then the ease of operation is improved, but contaminants can be deposited on the device through the fluid port
Solution Approach 1:
A shield assembly is positioned between the fluid port and the reticle to intercept contaminants carried by the fluid flow. The shield acts as an intermediary element that blocks particles from reaching the reticle while allowing the fluid port to maintain its pressure control function.
Solution Approach 2:
The device container assembly uses a composite structure combining the container, shield assembly, and filter system. This composite design integrates multiple protective functions (filtration and shielding) with the fluid port system to simultaneously achieve ease of operation and contaminant protection.
2Object-affected harmful factors
If the device container is designed to enclose the device completely, then the protection against contaminants is improved, but the ability to perform pressure changes is worsened
Solution Approach 1:
The shield assembly serves as an intermediary element within the enclosed container that enables pressure changes through the fluid port without compromising the enclosed protective environment. It mediates between the need for complete enclosure and the need for pressure control.
Solution Approach 2:
The protective system is segmented into multiple functional components: the enclosed container provides the primary protective barrier, while the shield assembly and filter system provide additional localized protection at the fluid port interface. This segmentation allows each component to optimize its specific function.
3Reliability
If a shield assembly is added to block contaminants from the fluid port, then the reticle integrity is improved, but the device complexity is worsened
Solution Approach 1:
The shield assembly is a relatively simple intermediary component that provides effective contaminant blocking without requiring complex mechanisms. Its simple geometric form (positioned between the fluid port and reticle) minimizes structural complexity while maximizing protective function.
Solution Approach 2:
The shield assembly and filter system are designed as replaceable protective elements that can be easily exchanged when contaminated or worn. This approach prioritizes reticle protection over long-term durability of the protective components themselves, allowing simple, cost-effective solutions to be used in critical protection roles.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The device container assembly effectively reduces particle transfer to the reticle during pressure changes and storage, maintaining the reticle's integrity and ensuring the quality of the images transferred to the wafer.
Implementation Method 1
The device container assembly can include a filter positioned in the fluid port that filters the fluid that flows through the filter
Implementation Method 2
the shield assembly is positioned between the fluid port and the device when the device is positioned within the device container. With this design, in certain embodiments, the shield assembly inhibits contaminants near the fluid port from being deposited on the device
Data Source
AI summary
A device container assembly (30) for storing a reticle (26) includes a device container (246) and a shield assembly (250). The device container (246) encircles the reticle (26). Further, the device container (246) includes a fluid port (254) that allows for the flow of fluid (276) into and out of the device container (246). The shield assembly (250) is encircled by the device container (246). Further, the shield assembly (250) is positioned between the fluid port (254) and the reticle (26) when the reticle (26) is positioned within the device container (246). The shield assembly (250) can inhibit contaminants (278) near the fluid port (254) from being deposited on the reticle (26) and can maintain the integrity of the reticle (26).