Reticle Storage Monitoring for Misplacement Alerts and Position Tracking
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Solution Overview
Problem
In semiconductor device production, reticles are often stored on reticle trees without a dedicated storage system, leading to the risk of reticles falling off when not placed correctly, causing production interruptions and economic losses.
Innovation Solution
A storage system comprising carrier devices with reticle placing regions, detection devices that send signals based on reticle placement, and alarm devices to alert users when reticles are not placed correctly, along with a storage device that stores reticle position information in a preset coordinate system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If reticles are stored on reticle trees without a dedicated storage system, then the storage structure is simple, but reticles may fall off when not placed correctly causing production interruptions
Solution Approach 1:
The storage system is divided into multiple independent carrier devices, each with its own detection device and alarm device. This segmentation allows the system to monitor and alert for each reticle placement independently, improving reliability without requiring a completely complex centralized system.
Solution Approach 2:
The detection devices are pre-positioned on the reticle tree structure to detect reticle placement before any potential falling can occur. The system performs preliminary detection and issues alarms in advance, preventing production interruptions rather than responding after problems occur.
2Measurement precision
If detection devices are added to monitor reticle placement, then reticle placement accuracy can be monitored, but the device complexity increases
Solution Approach 1:
The detection devices utilize the existing reticle tree structure and carrier devices as part of their mounting and operational framework. The system serves itself by using the storage structure's own components (carriers, positions) as reference points for detection, reducing the need for additional external infrastructure.
Solution Approach 2:
The detection devices serve multiple functions: they detect reticle presence, determine placement accuracy, and trigger alarm signals. This multi-functionality reduces the need for separate systems for each function, thereby reducing overall complexity while maintaining measurement precision.
3Reliability
If alarm devices are implemented to alert when reticles are misplaced, then production interruptions can be prevented, but the system complexity increases
Solution Approach 1:
The alarm devices provide immediate feedback when detection devices identify improper reticle placement. This closed-loop feedback system allows operators to correct misplaced reticles before they can fall and cause production interruptions, enhancing reliability through real-time monitoring and alerting.
Solution Approach 2:
The alarm system uses simple, inexpensive alerting mechanisms (such as visual or audible alarms) that can be easily replaced or reset. These lightweight alarm components do not require complex infrastructure, allowing reliable production monitoring without significant system complexity.
Data Source
AI summary
A storage system for reticles includes carrier devices, including reticle placing regions for placing the reticles; a storage device, storing a preset coordinate system and position information of the carrier devices in the preset coordinate system; detection devices, arranged in one-to-one correspondence with the carrier devices, where each detection device performs reticle detection on a respective carrier device, send first detection signal responsive to a reticle being placed in the reticle placing region, and send second detection signal responsive to a reticle being placed outside the reticle placing region, the detection devices are connected with the storage device, and the storage device is further configured to store reticle position information of the reticle in the preset coordinate system when receiving the first or second detection signal; and alarm devices, connected with the detection devices in one-to-one correspondence, where each alarm device implements alarm display when receiving the second detection signal.