Reticle Support Mobility to Reduce Reticle Surface Wear

Solution Overview

Problem

Wear at contact interfaces between reticle supports and reticles in reticle containers leads to scratching and particulate contamination, damaging the reticle surface.

Innovation Solution

Reticle supports with a movable distal end that allows lateral movement within a range of 10 to 100 micrometers to prevent sliding and scratching, using materials with high coefficients of friction and stiffness to maintain reticle position and reduce wear.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Stability of the object's composition

If reticle supports are made rigid to maintain stable reticle positioning, then positioning stability is improved, but wear and scratching at contact interfaces increases

Engineering Contradiction:

Improvereticle positioning stabilityVSAvoidwear and scratching at contact interfaces

Core Design Contradiction:

Stability of the object's compositionVSObject-affected harmful factors

Solution Approach 1:

The reticle support structure transitions from a completely rigid design to a dynamic system that allows controlled movement. The support body is configured to permit relative movement between the reticle and support within a specific range (10-100 micrometers), enabling the system to adapt to dimensional changes while maintaining stable positioning through controlled compliance rather than rigid constraint.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The invention changes the physical parameters of the reticle support system by introducing controlled mobility. The support structure allows movement within a defined range (10-100 micrometers) in the lateral direction, transforming the system from static to dynamically adjustable, thereby reducing wear while preserving positioning stability.

Inventive Principle:

Principle #35Parameter changes

2Object-affected harmful factors

If reticle supports are made flexible to reduce wear, then wear and scratching are reduced, but reticle positioning stability deteriorates

Engineering Contradiction:

Improvewear and scratching at contact interfacesVSAvoidreticle positioning stability

Core Design Contradiction:

Object-affected harmful factorsVSStability of the object's composition

Solution Approach 1:

The reticle support structure transitions from a completely rigid design to a dynamic system that allows controlled movement. The support body is configured to permit relative movement between the reticle and support within a specific range (10-100 micrometers), enabling the system to adapt to dimensional changes while maintaining stable positioning through controlled compliance rather than rigid constraint.

Inventive Principle:

Principle #15Dynamics

Solution Approach 2:

The invention changes the physical parameters of the reticle support system by introducing controlled mobility. The support structure allows movement within a defined range (10-100 micrometers) in the lateral direction, transforming the system from static to dynamically adjustable, thereby reducing wear while preserving positioning stability.

Inventive Principle:

Principle #35Parameter changes

3Object-affected harmful factors

If reticle supports allow movement to prevent sliding, then particulate contamination is reduced, but device complexity increases

Engineering Contradiction:

Improveparticulate contaminationVSAvoidreticle support structure complexity

Core Design Contradiction:

Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The reticle support structure implements local quality by providing different mechanical properties at different locations. The support body allows controlled movement in the lateral direction (10-100 micrometers) to prevent sliding and particulate generation, while maintaining rigidity in the vertical direction to preserve positioning stability. This localized differentiation of mechanical properties resolves the contradiction between movement capability and structural simplicity.

Inventive Principle:

Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

Reduces wear and particulate contamination by allowing controlled movement of reticle supports, maintaining reticle position and preventing surface damage during handling and storage.

Implementation Method 1

the reticle support body is configured to allow a movement of the distal end of the reticle support body with respect to the baseplate within a range from about 10 micrometers to about 100 micrometers along a direction in plane with the baseplate

Methodology Applied

Scientific EffectElastic deformation: Elasticity

Data Source

PatentUS20250271750A1Reticle supports for reducing wear in a reticle container

Publication Date: 2025.08.28 ENTEGRIS INC

AI summary

Reticle supports for use in a reticle container are provided for wear reduction. The reticle supports have a proximate end received in a baseplate. A reticle contact region at the distal end of the reticle support body contacts the reticle to suspend the reticle from the baseplate. The reticle support body allows a lateral movement of the distal end of the reticle support body along with the reticle with respect to the baseplate to prevent the reticle contact region of the reticle supports from sliding on and scratching the surface of reticle.