Reticle Transfer Device Real-Time Particle Detection
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Solution Overview
Problem
In the photoetching process for semiconductor manufacturing, existing Integrated Reticle Inspection Systems (IRIS) struggle to accurately determine the source of particulate matter on reticles, leading to inefficiencies in cleaning and reduced manufacturing capacity.
Innovation Solution
A reticle transfer device equipped with a bearing member, a light source, a light detector, and a controller that emits irradiation light, detects reflected light, and determines the presence of particulate matter based on light detection signals, allowing for real-time identification of the source of contamination.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If an Integrated Reticle Inspection System (IRIS) is used to detect particulate matter on reticles, then detection capability is provided, but the ability to accurately determine the source of particulate matter is insufficient
Solution Approach 1:
A light detector is introduced as an intermediary component between the light source and the reticle inspection system. The light detector captures reflected light from the reticle surface and generates light detection signals that provide information about particulate matter presence and location, thereby mediating the detection process and enabling source identification
Solution Approach 2:
The system implements feedback by using the light detector to continuously monitor the reticle surface during transfer operations. The light detection signals provide real-time feedback about particulate matter, allowing the system to identify contamination sources and trigger appropriate cleaning actions
2Productivity
If manual inspection and cleaning processes are used for reticle contamination, then cleaning can be performed, but manufacturing capacity is reduced due to inefficiencies
Solution Approach 1:
The light detector is positioned to inspect the reticle surface during the transfer process itself, performing preliminary detection of particulate matter before the reticle reaches the exposure apparatus. This allows for early identification of contamination, enabling timely cleaning actions that prevent production delays
Solution Approach 2:
The reticle transfer device is equipped with integrated light detection capabilities, allowing it to autonomously detect particulate matter on the reticle surface during transfer operations. This self-service detection eliminates the need for separate manual inspection steps, thereby improving manufacturing capacity
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables timely detection and accurate determination of particulate matter sources, facilitating rapid cleaning of components and enhancing semiconductor manufacturing capacity by identifying contamination origins effectively.
Implementation Method 1
The light source is arranged on, a side for bearing the reticle, of the bearing member, to emit irradiation light to the reticle. The reflected light is formed when the irradiation light irradiates the reticle.
Implementation Method 2
The light detector is configured to obtain the reflected light and generate a light detection signal based on the reflected light.
Data Source
AI summary
Provide are a reticle transfer device and an exposure system. The reticle transfer device includes a bearing member, a light source, a light detector and a controller. The bearing member is configured to bear the reticle, and the light source is configured to emit irradiation light to the reticle and form reflected light. The light detector is configured to obtain the reflected light and generate a light detection signal. The controller is configured to determine whether particulate matter exists on a surface of the reticle based on the light detection signal. The reticle transfer device can determine whether particulate matter exists on the surface of the reticle in real time based on the light detection signal.