Reticle Transfer Pre-Alignment Collision Avoidance
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Solution Overview
Problem
Conventional reticle transfer systems risk damaging the pellicle frame and contaminating the reticle due to collisions with reticle supports during pre-alignment, especially when the reticle is tilted excessively, leading to scrapping of the reticle.
Innovation Solution
A reticle transfer apparatus with a pre-alignment unit that detects two sets of marks on the reticle, adjusting its position relative to the reticle stage to prevent collisions and ensure accurate alignment, using a control unit to adjust the reticle's position based on pre-alignment results to maintain the pellicle frame within a safe range.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Speed
If mask transmission is performed by general file transfer methods (FTP, HTTP, SMTP), then compatibility with existing systems is maintained, but transmission speed is slow and time-consuming
Solution Approach 1:
The patent replaces traditional file transfer protocols (FTP, HTTP, SMTP) with a dedicated binary protocol optimized for mask data transmission. This substitution enables direct binary data transfer without protocol overhead, achieving transmission speeds 10-100 times faster while maintaining system compatibility through standardized interfaces.
Solution Approach 2:
The patent segments mask data into fixed-length records with specific formats (header, data, checksum). This segmentation enables efficient parallel processing and transmission optimization, allowing the system to handle large mask files through structured data blocks that can be transmitted and verified independently.
2Reliability
If mask data is transmitted with detailed error checking and verification, then transmission reliability is improved, but transmission time increases
Solution Approach 1:
The patent implements preliminary error detection by embedding checksum fields in each data record before transmission. The receiving system performs verification immediately upon receiving each record, enabling early detection of transmission errors without requiring complete data transfer before validation, thus reducing overall transmission time while maintaining reliability.
Solution Approach 2:
The patent implements automatic error recovery mechanisms that allow the system to skip corrupted records and continue transmission. When errors are detected, the system rapidly requests only the specific failed records rather than retransmitting entire data sets, significantly reducing time loss while maintaining transmission reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Prevents pellicle frame collisions with reticle supports, ensuring the reticle's integrity and enhancing transfer accuracy by employing a dual pre-alignment process with marks at strategic corners to guide precise positioning.
Implementation Method 1
a pre-alignment unit, disposed on one side of the reticle stage and configured to perform a first pre-alignment process by detecting the first set of marks and perform a second pre-alignment process by detecting the second set of marks
Data Source
Figure 1A~1B
Figure 2~3
Figure 4~5A
AI summary
A reticle transfer apparatus includes a reticle, a reticle stage (4) and a robot (2). The robot (2) is configured to support, transport and transfer the reticle onto the reticle stage (4). The apparatus further includes: a first set of marks (52) and a second set of marks (53), both provided on the reticle; a pre-alignment unit (3), disposed on one side of the reticle stage (4) and configured to perform a first pre-alignment process by detecting the first set of marks (52) and perform a second pre-alignment process by detecting the second set of marks (53) during the transfer of the reticle; and a control unit, configured to adjust the position of the reticle relative to the reticle stage (4) based on the results of the first pre-alignment process such that the reticle is prevented from colliding with the reticle stage (4) and to adjust the position of the reticle relative to the reticle stage (4) based on the results of the second pre-alignment process such that the reticle is positioned in a predetermined range relative to the reticle stage (4). A reticle transfer method is also disclosed.