ESD-Protected Reticle Transport Vehicle With Onboard Ion Neutralization
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Solution Overview
Problem
Conventional electrostatic discharge eliminators in cleanroom environments often fail to provide sufficient ion downflow, leading to increased risk of damage from electrostatic discharges during the transport and storage of sensitive reticles and masks in semiconductor fabrication facilities.
Innovation Solution
A vehicle equipped with electrostatic charge eliminators, including a frame, multiple shelves, and a power supply module with battery and fan, which generates and distributes positive and negative ions to neutralize electrostatic charges on objects, preventing damage from electrostatic discharges.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If conventional electrostatic discharge eliminators are used in cleanroom environments, then electrostatic charges can be neutralized, but insufficient ion downflow is generated leading to inadequate protection during transport and storage
Solution Approach 1:
The patent transitions from ceiling-mounted ESD eliminators that rely on vertical ion downflow to a mobile vehicle-based system with laterally positioned electrodes. This dimensional change allows ions to be delivered directly to objects during transport, eliminating the insufficient downflow problem of conventional systems.
Solution Approach 2:
The patent introduces a mobile vehicle as an intermediary carrier between storage and processing locations. This vehicle integrates ESD eliminators directly onto the transport platform, serving as both transport medium and protection device, thereby ensuring continuous ESD protection during movement.
2Duration of action of moving object
If battery-powered electrostatic charge eliminators are used on mobile vehicles, then continuous protection can be provided during transport, but device complexity increases
Solution Approach 1:
The mobile vehicle serves multiple functions: it acts as both a transport platform and an integrated ESD protection system. The battery-powered eliminators on the vehicle provide continuous protection during transport, storage, and handling operations, eliminating the need for separate ceiling-mounted systems.
Solution Approach 2:
The vehicle-based ESD system provides self-contained protection during transport operations. The battery-powered eliminators operate autonomously on the mobile platform, neutralizing charges on objects during their entire journey without requiring external infrastructure or ceiling-mounted installations.
3Ease of operation
If objects are transported and stored in conventional cleanroom environments with ceiling-mounted eliminators, then electrostatic protection is provided, but ion downflow is insufficient leading to charge accumulation on transported objects
Solution Approach 1:
The patent segments the ESD protection function from the fixed ceiling infrastructure and relocates it to mobile vehicles. This segmentation allows ESD protection to move with the objects being transported, ensuring continuous protection rather than relying on stationary ion downflow zones.
Solution Approach 2:
The patent transforms the static, ceiling-mounted ESD eliminator system into a dynamic, mobile platform that moves with the objects. This dynamic positioning ensures that ESD protection is continuously available during transport operations, adapting to the moving objects rather than requiring objects to remain in fixed protected zones.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Effectively prevents electrostatic discharge damage to reticles and masks during transport and storage, ensuring the integrity of microelectronic circuits by maintaining a neutral electrostatic environment.
Implementation Method 1
electrostatic charge eliminators, including a frame, multiple discharge electrodes, and a power supply module with a battery and AC/DC selector switch, which generates and distributes ions to neutralize electrostatic charges on the objects
Implementation Method 2
The vehicle effectively neutralizes electrostatic charges on masks and reticles, reducing the risk of damage and ensuring the integrity of microelectronic circuits during transport and storage
Data Source
AI summary
A novel vehicle which is suitable for transporting and/or temporarily storing objects such as masks or reticles and is effective in eliminating or preventing electrostatic discharges on the masks, reticles or other objects. The vehicle includes a frame for receiving the objects and at least one ESD eliminator provided on the frame for neutralizing electrostatic charges on the objects. Neutralization of the electrostatic charges prevents electrostatic discharges from damaging microelectronic circuits, for example, on the masks, reticles or other objects.