Retractable Magnet Bar Assembly for Rotary Cathode Target Tubes
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Solution Overview
Problem
The strong attractive force between magnetic target materials and magnet bars in sputtering apparatuses makes it difficult to insert and remove magnet bars from target tubes, requiring external tools and complex remote-control equipment.
Innovation Solution
A magnet bar assembly with a positioning mechanism that allows the magnet bar to be moved between a retracted position for easy insertion and removal, and a deployed position for effective magnetic field penetration, using mechanical, pneumatic, hydraulic, or magnetic forces, and adjustable mechanisms for fine-tuning the magnetic field.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If the magnet bar is positioned close to the target tube inner surface for effective magnetic field penetration, then the magnetic confinement for sputtering is improved, but the insertion and removal of the magnet bar becomes difficult due to strong attractive force
Solution Approach 1:
The magnet bar is made movable relative to the target tube through a positioning mechanism that allows it to be dynamically adjusted between a retracted position (for easy insertion/removal) and a deployed position (for effective magnetic confinement during sputtering). This dynamic positioning resolves the contradiction by enabling the system to switch between operational states.
Solution Approach 2:
The magnet bar is pre-positioned in a retracted state before insertion into the target tube, reducing the magnetic attractive force during the insertion process. After insertion, the magnet bar is then moved to the deployed position to establish strong magnetic confinement for the sputtering process.
2Productivity
If the magnet bar is held in a fixed deployed position for optimal sputtering performance, then the magnetic field penetration is improved, but the flexibility for maintenance and adjustment is reduced
Solution Approach 1:
The positioning mechanism enables the magnet bar to be dynamically repositioned between deployed (for optimal sputtering) and retracted (for maintenance) states, providing both high productivity during operation and flexibility for maintenance activities.
Solution Approach 2:
The magnet bar assembly is separated into movable and stationary components, with the magnet bar itself being the movable element that can be independently positioned. This segmentation allows the magnet bar to be adjusted or removed without affecting the overall target tube structure.
3Ease of operation
If a positioning mechanism is added to enable magnet bar movement between retracted and deployed positions, then the ease of operation is improved, but the device complexity increases
Solution Approach 1:
The patent replaces complex mechanical positioning systems with simpler mechanisms such as springs, latches, or magnetic coupling systems that enable automatic or semi-automatic positioning of the magnet bar, reducing overall device complexity while maintaining ease of operation.
Solution Approach 2:
The positioning mechanism is designed to be self-actuating or self-locking, where the magnet bar's own magnetic force or mechanical geometry enables automatic positioning and locking in the deployed state, eliminating the need for external actuators or complex control systems.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables easy insertion and removal of magnet bars without external tools, maintains strong magnetic confinement for sputtering processes, and allows for magnetic field adjustments to ensure uniformity and plasma confinement.
Implementation Method 1
allows a magnetic field from the magnet bar structure to penetrate through the magnetic target material
Implementation Method 2
The magnetic properties of the magnetic target material cause an attractive force between the target material and the magnet bar
Data Source
Figure 1A
Figure 1B
Figure 1C
AI summary
A magnet bar assembly for a rotary target cathode comprises a support structure, a magnet bar structure movably attached to the support structure and including a plurality of magnets, and a positioning mechanism operatively coupled to the support structure and the magnet bar structure. The positioning mechanism is configured to move the magnet bar structure between a retracted position and a deployed position while inside a magnetic target material cylinder. The retracted position substantially reduces a magnetic force between the magnets and a magnetic target material of a target cylinder when the magnet bar assembly is inserted into the target cylinder or removed from the target cylinder. The deployed position substantially increases the magnetic force between the magnets and the magnetic target material when the magnet bar assembly is in the target cylinder, and allows a magnetic field from the magnet bar structure to penetrate through the magnetic target material.