Retrieving Device Front Support for FOUP Handling

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Solution Overview

Problem

The existing manual conveying devices for semiconductor wafers face difficulties in handling large and heavy FOUPs due to the need to insert gripping units into small clearances between the FOUP and shelves, requiring improved workability for efficient manual conveyance.

Innovation Solution

A retrieving device with a supporting unit to lift and support the front portion of the load, coupled to a moving device for up-and-down movement, and a gripping unit on the opposite side to balance and stabilize the load, allowing for stable retrieval even in tight spaces.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If a gripping unit is inserted into the small clearance between the FOUP and shelf to perform manual conveyance, then the FOUP can be gripped and moved, but the workability is poor due to the difficulty of inserting and operating the gripping unit in the tight space

Engineering Contradiction:
ImproveworkabilityVSAvoidclearance constraint
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

A supporting unit is introduced as an intermediary component between the FOUP and the operator. This supporting unit can be positioned at the front of the FOUP and provides a stable base for operation, making it easier to handle the FOUP without directly inserting hands or tools into the tight clearance between the FOUP and shelf

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

Instead of attempting to grip the FOUP from the side through the limited horizontal clearance, the supporting unit approaches from the front direction, utilizing the depth dimension of the clearance. This dimensional shift allows access to the FOUP without requiring lateral insertion through the constrained space

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

2Adaptability or versatility

If the FOUP size and weight are increased to accommodate larger semiconductor wafers, then the capacity is improved, but the difficulty of manual handling increases

Engineering Contradiction:
Improvewafer capacityVSAvoidhandling difficulty
Core Design Contradiction:
Adaptability or versatilityVSEase of operation

Solution Approach 1:

The supporting unit acts as a mediator between the operator and the heavy FOUP. By providing a stable platform at the front of the FOUP, it enables operators to apply force more effectively and safely when moving heavy loads, reducing the direct physical strain on handlers

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The supporting unit is designed to counterbalance the weight of the FOUP by providing structural support at the front. This counterbalancing effect reduces the effective weight that operators need to lift and maneuver, making heavy FOUPs easier to handle

Inventive Principle:
Principle #8Anti-weight (Counterweight)

Data Source

PatentUS10643877B2Retrieving device and storing device
Publication Date: 2020.05.05 MURATA MASCH LTD
  • US10643877B2 patent drawing
  • US10643877B2 patent drawing
  • US10643877B2 patent drawing

AI summary

A retrieving device 1 includes: a supporting unit 13 configured to support a front portion of the load 120 from a front side of the load 120; a coupling unit 9, 11 configured to be coupled, via a coupling member 142, to a moving device 140 being capable of moving the supporting unit 13 in an up-and-down direction; and a gripping unit 15, 17 provided on a side opposite to the supporting unit 13 with the coupling unit 9, 11 interposed therebetween.