Reverse-Biased ESD Clamp Circuit for Low-Capacitance I/O Protection

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Solution Overview

Problem

Existing ESD protection circuits for semiconductor chips face challenges in providing robust protection while maintaining low capacitive load and linearity, especially under high-speed signal conditions and modern semiconductor technology nodes with low ESD victim breakdown voltages.

Innovation Solution

The proposed ESD protection circuitry employs a dual-diode configuration with reverse-biased diodes to create a low-capacitance, over- and undervoltage-tolerant protection path. This configuration includes a first conductive path with a voltage level higher than the positive supply voltage and a second conductive path with a voltage level lower than the negative supply voltage, both coupled to a second node via capacitors, minimizing capacitive load and improving linearity.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If robust ESD protection is implemented, then protection capability is improved, but capacitive load increases

Engineering Contradiction:
ImproveESD protection capabilityVSAvoidcapacitive load
Core Design Contradiction:
ReliabilityVSObject-affected harmful factors

Solution Approach 1:

The patent changes the biasing parameter of the diodes from forward-biased or zero-biased to reverse-biased state. This parameter change reduces the junction capacitance of the diodes significantly, thereby reducing the capacitive load on the I/O node while maintaining ESD protection capability through the reverse-biased diode clamping action.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The patent implements dynamic biasing of the diodes using voltage levels that are higher than the positive supply voltage and lower than the negative supply voltage. This dynamic biasing arrangement allows the diodes to operate in reverse-biased state during normal operation (reducing capacitance) while still providing ESD protection when voltage excursions occur.

Inventive Principle:
Principle #15Dynamics

2Reliability

If robust ESD protection is implemented, then protection capability is improved, but linearity deteriorates

Engineering Contradiction:
ImproveESD protection capabilityVSAvoidlinearity
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

By changing the biasing parameter to reverse-biased state, the diodes operate in a region with lower capacitance and improved linearity. The reverse-biased diodes present a more linear impedance to the I/O node compared to forward-biased diodes, thereby improving signal linearity while maintaining ESD protection through voltage clamping.

Inventive Principle:
Principle #35Parameter changes

3Object-affected harmful factors

If low capacitive load is achieved, then signal integrity is improved, but ESD protection capability deteriorates

Engineering Contradiction:
Improvecapacitive loadVSAvoidESD protection capability
Core Design Contradiction:
Object-affected harmful factorsVSReliability

Solution Approach 1:

The dynamic biasing arrangement allows the diodes to switch between low-capacitance reverse-biased state during normal operation and conductive state during ESD events. The voltage levels are configured to maintain reverse-bias under normal conditions (low capacitance) while allowing forward conduction when ESD voltage exceeds the bias voltage plus diode drop.

Inventive Principle:
Principle #15Dynamics

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The solution effectively enhances ESD protection while reducing the capacitive load on I/O nodes, improving signal integrity, bandwidth, and linearity, particularly for high-speed signals, and is compatible with modern semiconductor technology nodes.

Implementation Method 1

the at least one first diode is reversely biased by the first voltage level and the at least one second diode is reversely biased by the second voltage level

Methodology Applied
Scientific EffectReverse biasing: Diode

Data Source

PatentUS20250174987A1ESD protection circuitry for a semiconductor chip, semiconductor chip, base station and mobile device
Publication Date: 2025.05.29 INTEL CORP
  • US20250174987A1 patent drawing
  • US20250174987A1 patent drawing
  • US20250174987A1 patent drawing

AI summary

ElectroStatic Discharge (ESD) protection circuitry for a semiconductor chip. The ESD protection circuitry includes a first node for coupling to an I/O node of the semiconductor chip and includes a first conductive path coupled to the first node via a first diode. The first conductive path is configured to be at first voltage level higher than or equal to a voltage level of a first supply voltage. The ESD protection circuitry includes a second conductive path coupled to the first node via a second diode. The second conductive path is configured to be at second voltage level lower than or equal to a voltage level of a second supply voltage. The second supply voltage is lower than the first supply voltage. The ESD protection circuitry includes a second node for coupling to a ground node or a supply node of the semiconductor chip for providing the second supply voltage.