RF Amplifier Conductor-Less Substrate Inductor Integration

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Solution Overview

Problem

Wirebond arrays in RF amplifiers lead to undesirable inductive coupling and complex, costly back-end assembly processes, affecting device performance and cost.

Innovation Solution

Implementing high-Q impedance matching circuits on semiconductor substrates with patterned back metal, eliminating the need for wirebond arrays by using physically separated input, output, and ground ports, and integrating inductors and capacitors on a single semiconductor die.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If wirebond arrays are used to achieve high-Q inductors, then inductor quality factor is improved, but device complexity and manufacturing cost increase

Engineering Contradiction:
Improveinductor quality factorVSAvoidassembly process complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent merges the inductor function into the semiconductor substrate itself by creating conductor-less regions that serve as inductive elements. This integration eliminates the need for separate wirebond arrays, combining multiple functions (substrate support, electrical connection, and inductance) into a single component, thereby reducing assembly complexity while maintaining high-Q performance.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent extracts the inductive function from the wirebond arrays and relocates it to the semiconductor substrate through conductor-less regions. This separation removes the harmful inductive coupling between wirebonds while preserving the desired inductance for impedance matching, solving both the coupling problem and the assembly complexity issue.

Inventive Principle:
Principle #2Taking out (Extraction)

2Reliability

If wirebond arrays are used to achieve high-Q inductors, then inductor quality factor is improved, but manufacturing cost increases

Engineering Contradiction:
Improveinductor quality factorVSAvoidmanufacturing cost
Core Design Contradiction:
ReliabilityVSEase of manufacture

Solution Approach 1:

By merging the inductor function into the substrate through conductor-less regions, the patent eliminates the need for expensive wirebond array attachment equipment and processes. This integration allows standard semiconductor manufacturing techniques to produce high-Q inductors, significantly reducing manufacturing costs while maintaining performance.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The conductor-less regions in the substrate provide the inductive function inherently, without requiring additional components or assembly steps. The substrate serves itself by providing both mechanical support and electrical functionality, eliminating the need for external wirebond arrays and their associated manufacturing infrastructure.

Inventive Principle:
Principle #25Self-service

3Reliability

If wirebond arrays are used for impedance matching, then inductor performance is improved, but inductive coupling between components occurs

Engineering Contradiction:
Improveimpedance matching performanceVSAvoidinductive coupling
Core Design Contradiction:
ReliabilityVSObject-generated harmful factors

Solution Approach 1:

The patent extracts the inductive function from the wirebond arrays and places it directly in the substrate. This spatial separation eliminates the parasitic inductive coupling between adjacent wirebonds while preserving the controlled inductance needed for impedance matching, thereby removing the harmful effect without sacrificing performance.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The conductor-less regions act as intermediary elements that provide the necessary inductance for impedance matching without creating unwanted coupling. These regions serve as a mediating structure between signal paths, providing controlled inductance while electrically isolating adjacent circuits to prevent harmful inductive coupling.

Inventive Principle:
Principle #24Intermediary (Mediator)

4Reliability

If wirebond arrays are integrated into RF devices, then inductor quality is improved, but back-end assembly processes become more complex

Engineering Contradiction:
Improveinductor qualityVSAvoidback-end assembly complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines the inductor function with the substrate structure, eliminating the need for separate wirebond array assembly. This merging allows high-Q inductors to be formed as an integral part of the substrate during standard semiconductor fabrication, removing complex back-end assembly processes while maintaining inductor quality.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent replaces the mechanical wirebond array attachment process with a semiconductor fabrication process. Instead of using mechanical equipment to attach and shape wirebonds, the inductive structures are formed through conventional semiconductor manufacturing techniques, dramatically simplifying back-end assembly while achieving comparable or superior inductor performance.

Inventive Principle:
Principle #28Mechanics substitution (Replace mechanical system)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach reduces manufacturing costs, eliminates inductive coupling, and achieves higher integration and efficiency in RF amplifiers, with inductors exhibiting significantly higher quality factors compared to conventional designs.

Implementation Method 1

an underlying conductor-less region that reduces parasitic capacitance to the substrate

Methodology Applied
Scientific EffectParasitic capacitance reduction: Capacitance

Data Source

PatentUS10637400B2RF amplifier with conductor-less region underlying filter circuit inductor, and methods of manufacture thereof
Publication Date: 2020.04.28 FREESCALE SEMICON INC
  • US10637400B2 patent drawing
  • US10637400B2 patent drawing
  • US10637400B2 patent drawing

AI summary

An amplifier includes a semiconductor substrate. A first conductive feature partially covers the bottom substrate surface to define a conductor-less region of the bottom substrate surface. A first current conducting terminal of a transistor is electrically coupled to the first conductive feature. Second and third conductive features may be coupled to other regions of the bottom substrate surface. A first filter circuit includes an inductor formed over a portion of the top substrate surface that is directly opposite the conductor-less region. The first filter circuit may be electrically coupled between a second current conducting terminal of the transistor and the second conductive feature. A second filter circuit may be electrically coupled between a control terminal of the transistor and the third conductive feature. Conductive leads may be coupled to the second and third conductive features, or the second and third conductive features may be coupled to a printed circuit board.