RF Transistor Chiplet Integration With Tuning Circuits for Impedance Matching

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Solution Overview

Problem

There is a need for an electronic assembly that efficiently integrates radio frequency (RF) transistor chiplets with pre-fabricated interconnects and passive components into a host wafer, allowing for faster and cost-effective manufacturing of microwave or RF integrated circuits by decoupling the fabrication of active and passive circuitry components.

Innovation Solution

The integration of RF transistor chiplets with interconnection tuning circuits into the host wafer cavities, utilizing pre-fabricated passive components such as resistors, capacitors, and inductors to match impedances and stabilize signals, enabling heterogeneous integration of different semiconductor technologies like GaN and silicon-based circuits.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If RF transistor chiplets are integrated with pre-fabricated interconnects and passive components into a host wafer, then manufacturing speed and cost-effectiveness are improved, but manufacturing precision and impedance matching become more difficult

Engineering Contradiction:
Improvemanufacturing speedVSAvoidimpedance matching
Core Design Contradiction:
ProductivityVSManufacturing precision

Solution Approach 1:

Passive components (resistors, capacitors, inductors) are pre-fabricated on the host wafer before chiplet integration. This preliminary preparation of interconnect structures and passive components enables faster assembly while maintaining precise impedance control through pre-designed circuit configurations that are optimized before the chiplet is attached.

Inventive Principle:
Principle #10Preliminary action

Solution Approach 2:

Tuning circuits comprising pre-fabricated passive components serve as intermediary elements between the RF transistor chiplet and the host wafer interconnects. These tuning circuits act as mediators that enable precise impedance matching and signal stabilization without requiring modifications to the chiplet itself, thus maintaining manufacturing speed while achieving precise electrical characteristics.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Reliability

If heterogeneous integration of different semiconductor technologies is implemented, then circuit performance is improved, but device complexity increases

Engineering Contradiction:
Improvecircuit performanceVSAvoidintegration complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The electronic assembly is segmented into distinct functional components: the host wafer containing pre-fabricated passive components and interconnects, and separate RF transistor chiplets made from different semiconductor technologies (e.g., GaN, silicon). This segmentation allows each component to be optimized independently for its specific function while maintaining overall system performance, reducing the complexity of heterogeneous integration compared to monolithic approaches.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

The host wafer is designed with universal interconnect structures and pre-fabricated passive components that can accommodate multiple types of RF transistor chiplets from different semiconductor technologies. This universal platform approach enables heterogeneous integration of various technologies (GaN, silicon, etc.) without requiring technology-specific customization of the host wafer, thereby improving circuit performance while managing device complexity.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Data Source

PatentUS11810876B1Heterogeneous integration of radio frequency transistor chiplets having interconnection tuning circuits
Publication Date: 2023.11.07 PSEUDOLITHIC INC
  • US11810876B1 patent drawing
  • US11810876B1 patent drawing
  • US11810876B1 patent drawing

AI summary

An electronic assembly has a host wafer having a first circuit including passive devices for the purpose of one of tuning or matching networks. Chiplets are placed in the cavities. At least one chiplet has a second circuit including at least one transistor or switch device and passive tuning circuits including at least one of a stabilization network, a gain boosting network, a power delivery network, or a low-noise network. Electrical interconnects between the chiplets and wafer electrically connect the first circuitry to the second circuitry.