RF Amplifier Die Pillar Interconnects With Backside Passives

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Solution Overview

Problem

Conventional RF power amplifier designs face limitations in high-frequency applications due to the introduction of undesired series inductance from wire bonds, which reduces the effectiveness of matching circuits and increases package size and complexity.

Innovation Solution

The integration of conductive pillars on the front side of the RF transistor amplifier die for electrical connections and passive electronic components on the back side, eliminating the need for wire bonds and enhancing control over geometry and precision.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If wire bonds are used for electrical connections in RF power amplifier packages, then ease of connection is improved, but series inductance increases and circuit precision deteriorates

Engineering Contradiction:
Improveease of connectionVSAvoidcircuit precision
Core Design Contradiction:
Ease of operationVSMeasurement precision

Solution Approach 1:

The patent removes wire bonds from the RF power amplifier package by integrating conductive pads and interconnect structures directly onto the substrate. This extraction eliminates the source of series inductance while maintaining electrical connectivity through alternative integrated pathways, thereby improving circuit precision without sacrificing connection functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges the functions of separate wire bond connections into integrated substrate-based interconnect structures. By combining multiple connection functions into unified pad and trace structures on the substrate, the design eliminates wire bonds and reduces the number of discrete connection elements, thereby reducing series inductance and improving overall circuit precision.

Inventive Principle:
Principle #5Merging (Combining)

2Ease of operation

If wire bonds and off-chip connections are used, then ease of connection is improved, but package size increases

Engineering Contradiction:
Improveease of connectionVSAvoidpackage size
Core Design Contradiction:
Ease of operationVSArea of stationary object

Solution Approach 1:

The patent merges off-chip connections and wire bonds into integrated substrate-based interconnect structures. By combining multiple discrete connection elements into unified pad and trace structures directly on the substrate, the design reduces the overall package footprint while maintaining all necessary electrical connections.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The patent transitions from three-dimensional wire bond connections (extending above and below the chip surface) to planar two-dimensional interconnect structures embedded within the substrate plane. This dimensional change eliminates the vertical space requirements of wire bonds, thereby reducing package height and overall size while maintaining connection functionality.

Inventive Principle:
Principle #17Another dimension (Dimensionality change)

3Ease of operation

If wire bonds and off-chip connections are used, then ease of connection is improved, but device complexity increases

Engineering Contradiction:
Improveease of connectionVSAvoidpackage complexity
Core Design Contradiction:
Ease of operationVSDevice complexity

Solution Approach 1:

The patent extracts and removes wire bonds and off-chip connections from the package design, replacing them with integrated substrate-based interconnect structures. This extraction simplifies the overall device architecture by eliminating discrete connection components and their associated assembly steps, thereby reducing package complexity while maintaining connection functionality.

Inventive Principle:
Principle #2Taking out (Extraction)

Solution Approach 2:

The patent merges multiple separate connection functions (wire bonds, off-chip connections, pads, traces) into unified integrated interconnect structures on the substrate. By combining these discrete elements into single integrated features, the design reduces the number of components and assembly steps, thereby simplifying the overall device complexity.

Inventive Principle:
Principle #5Merging (Combining)

Data Source

PatentUS11769768B2Methods for pillar connection on frontside and passive device integration on backside of die
Publication Date: 2023.09.26 MACOM TECH SOLUTIONS HLDG INC
  • US11769768B2 patent drawing
  • US11769768B2 patent drawing
  • US11769768B2 patent drawing

AI summary

An integrated circuit device includes a radio frequency transistor amplifier die having a first surface, a second surface, a semiconductor layer structure that is between the first and second surfaces and includes a plurality of transistor cells adjacent the first surface, and terminals coupled to the transistor cells. At least one passive electronic component is provided on the second surface of the die and is electrically connected to at least one of the terminals, for example, by at least one conductive via. One or more conductive pillar structures may protrude from the first surface of the die to provide electrical connections to one or more of the terminals.