RF Electrode Assembly With Focus Ring Temperature Control
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Solution Overview
Problem
Conventional plasma processing apparatuses face difficulties in adjusting polymer distribution in the edge area of substrates during plasma processing, making it challenging to form trenches that meet process requirements.
Innovation Solution
A radio frequency electrode assembly is introduced, featuring a heat conducting ring with a second fluid passage connected to a second fluid source, enabling temperature control between the heat conducting ring and focus ring, which allows for adjustable polymer distribution at the substrate edge by adjusting the temperature of the second fluid source, along with a measuring unit to ensure the trench size meets target specifications.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If conventional plasma processing apparatus structure is used, then the apparatus is simple in structure, but it is difficult to adjust polymer distribution in the edge area of the substrate
Solution Approach 1:
The apparatus is segmented into distinct functional components: a base with first fluid passages for substrate temperature control, a focus ring with second fluid passages for edge area temperature control, and a heat conducting ring. This segmentation allows independent control of different regions, enabling adjustment of polymer distribution in the edge area without complicating the overall structure excessively.
Solution Approach 2:
The heat conducting ring acts as an intermediary component that thermally couples the base and the focus ring. It has first fluid passages for receiving cooling fluid from the base and second fluid passages for supplying cooling fluid to the focus ring, mediating thermal energy transfer between components to achieve coordinated temperature control.
2Manufacturing precision
If temperature control is added to adjust polymer distribution, then polymer distribution adjustment capability is improved, but the device complexity increases
Solution Approach 1:
The heat conducting ring serves multiple functions: it acts as a thermal conductor between the base and focus ring, provides cooling channels through its fluid passages, and structurally supports the focus ring. This multi-functionality reduces the need for separate components, achieving temperature control without proportionally increasing device complexity.
Solution Approach 2:
The system controls polymer distribution by changing temperature parameters through fluid passages. By adjusting the temperature of cooling fluid supplied to different regions (base vs. focus ring), the system precisely controls polymer distribution in the edge area, achieving manufacturing precision through parameter control rather than structural complexity.
3Stability of the object's composition
If heat conducting ring is added between base and focus ring, then temperature distribution uniformity is improved, but the device structure becomes more complex
Solution Approach 1:
The heat conducting ring merges multiple functions into a single component: it provides thermal conduction pathways, houses cooling fluid passages, and structurally supports the focus ring. This merging approach improves temperature distribution uniformity by integrating thermal management and structural functions, avoiding the need for separate components for each function.
Solution Approach 2:
The heat conducting ring is disposed between the base and the focus ring, with the focus ring positioned above it. The heat conducting ring's fluid passages are nested within its structure, and it thermally couples with both the base below and the focus ring above, creating a nested arrangement that improves temperature uniformity without excessive structural complexity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution allows for precise temperature control and uniform temperature distribution, facilitating the formation of trenches that meet process requirements by adjusting the polymer distribution at the substrate edge, thereby improving the precision and effectiveness of plasma processing.
Implementation Method 1
heat conduction being enabled between the heat conducting ring and the focus ring
Implementation Method 2
a first fluid passage being provided in the base, the first fluid passage being configured for connecting to a first fluid source; a second fluid passage being provided in the heat conducting ring, the second fluid passage being connected to a second fluid source
Data Source
AI summary
Disclosed are a radio frequency electrode assembly for a plasma processing apparatus, and a plasma processing apparatus, wherein the radio frequency electrode assembly for a plasma processing apparatus comprises: a base in which a first fluid passage is provided, the first fluid passage being configured for connecting to a first fluid source; an electrostatic chuck disposed on the base; a focus ring disposed peripheral to the electrostatic chuck; a heat conducting ring disposed around the base, the heat conducting ring enclosing at least part of the base, the heat conducting ring being disposed below the focus ring, a second fluid passage being provided in the heat conducting ring, the second fluid passage being connected to a second fluid source, heat conduction being enabled between the heat conducting ring and the focus ring. The plasma processing apparatus can adjust polymers distribution in the edge area of the to-be-processed substrate.