RF Transmission Fault Location via Baseline Model Deflection
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Solution Overview
Problem
The existing methods for monitoring and controlling plasma performance in plasma-based systems, particularly in RF transmission systems, are inefficient and costly, as they rely on voltage monitoring which does not provide satisfactory results and is time-consuming.
Innovation Solution
A method using RF transmission system modeling to identify faults by characterizing the system, selecting stages, measuring outputs, and propagating them through a baseline RF model to detect points of deflection, thereby locating faults in the RF transmission system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If voltage monitoring is used to monitor and control plasma performance, then plasma performance can be monitored and controlled, but the method is expensive and time-consuming and does not provide satisfactory results
Solution Approach 1:
The patent replaces the traditional voltage monitoring method with an RF transmission line modeling approach. Instead of directly measuring voltage parameters in the plasma chamber, the system uses a virtual model of the RF transmission line to calculate and infer plasma performance parameters from RF power delivery measurements, eliminating the need for direct voltage monitoring hardware and procedures
Solution Approach 2:
The patent creates a virtual copy or model of the RF transmission line system. This digital model replicates the electrical characteristics and behavior of the physical RF transmission line, allowing the system to simulate and predict plasma performance based on RF power measurements without requiring direct access to voltage sensors in the plasma environment
2Ease of operation
If voltage monitoring is used to control plasma operations, then plasma operations can be controlled, but the operation is expensive
Solution Approach 1:
The patent substitutes expensive voltage monitoring hardware and procedures with a computational modeling approach. The RF transmission line model uses standard RF power measurements and circuit theory calculations to provide the same control functionality, eliminating the need for specialized voltage sensing equipment and reducing operational costs
Solution Approach 2:
The system uses its own existing RF power delivery measurements and built-in transmission line model to self-determine plasma performance parameters. The model leverages data already being collected during normal RF power delivery operations, eliminating the need for separate, expensive monitoring systems
3Measurement precision
If traditional voltage monitoring methods are used, then plasma performance can be monitored, but the results are not satisfactory
Solution Approach 1:
The patent creates an accurate virtual representation of the RF transmission line that preserves all electrical characteristics. This digital model allows for precise calculation of plasma performance parameters by propagating RF measurements through the modeled transmission line, maintaining measurement fidelity while enabling more comprehensive parameter extraction than direct voltage monitoring
Solution Approach 2:
The patent transitions from direct voltage measurement in the plasma domain to RF power measurement and calculation in the transmission line domain. By working with the RF power delivery characteristics and transmission line parameters, the system accesses additional information dimensions that provide more complete and accurate plasma performance data
Data Source
AI summary
Systems and methods for identifying a location of a fault in an RF transmission system includes characterizing the RF transmission system and selecting one of the stage in the RF transmission system as an initial selected stage. An output of the initial selected stage can be measured in the characterized RF transmission system. The measured output of the initial selected stage is propagated through a baseline RF model and a point of deflection is identified in a resulting RF model of the RF transmission system.