Self-aligning RF Filter Box Connectors for Semiconductor Pedestal Lifts

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Solution Overview

Problem

Existing RF filter boxes for semiconductor processing systems require manual manipulation of connecting wires for electrical connections, leading to inconsistent and difficult alignment, which affects the reliability and consistency of signal filtering.

Innovation Solution

An electrostatic chuck RF filter box with self-aligning electrical connectors and alignment features that automatically mate with corresponding connectors on the pedestal lift bracket, eliminating the need for manual wire manipulation and ensuring consistent electrical and mechanical connections.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Ease of operation

If manual connectors are used for electrical connections, then flexibility in connection method is improved, but alignment consistency and connection reliability deteriorate

Engineering Contradiction:

Improveflexibility in connection methodVSAvoidalignment consistency

Core Design Contradiction:

Ease of operationVSReliability

Solution Approach 1:

The system uses self-aligning electrical connectors that automatically mate with corresponding connectors on the pedestal lift bracket when the filter box is mounted. The alignment features guide the connectors into proper position without requiring manual manipulation, enabling the system to self-align and self-connect during the mounting process.

Inventive Principle:

Principle #25Self-service

Solution Approach 2:

The patent replaces manual mechanical wire manipulation with an automated mechanical mounting process. The alignment features and self-aligning connectors transform the connection process from a manual dexterity-based task to a straightforward mounting operation where the connectors automatically engage when the filter box is secured to the bracket.

Inventive Principle:

Principle #28Mechanics substitution (Replace mechanical system)

2Adaptability or versatility

If manual wire manipulation is required, then adaptability in connection configuration is improved, but manufacturing precision and connection consistency deteriorate

Engineering Contradiction:

Improveconnection configuration flexibilityVSAvoidwire placement consistency

Core Design Contradiction:

Adaptability or versatilityVSManufacturing precision

Solution Approach 1:

The electrical connectors are pre-positioned on the filter box and pedestal lift bracket during manufacturing. The alignment features are built into the mounting surfaces, so that when the filter box is mounted, the connectors are already in the correct positions and automatically mate without requiring precise manual wire placement during installation.

Inventive Principle:

Principle #10Preliminary action

3Reliability

If automatic electrical connections are implemented, then connection consistency and reliability are improved, but device complexity increases

Engineering Contradiction:

Improveconnection consistencyVSAvoidconnector and alignment feature structure

Core Design Contradiction:

ReliabilityVSDevice complexity

Solution Approach 1:

The patent combines multiple functions into integrated components. The alignment features are incorporated directly into the mounting bracket and filter box housing, and the electrical connectors are integrated with these alignment features. This merging eliminates the need for separate alignment mechanisms and manual wire manipulation steps, achieving automatic connection without proportionally increasing overall device complexity.

Inventive Principle:

Principle #5Merging (Combining)

Data Source

PatentUS10944374B2Electrostatic chuck filter box and mounting bracket

Publication Date: 2021.03.09 LAM RES CORP

AI summary

An apparatus and method electrically coupling an electrostatic chuck RF filter box with a pedestal lift. The RF filter box has a contact block and at least one alignment feature on an outer mating surface of the RF filter block. The contact block includes self-aligning electrical connectors and the alignment feature is configured for aligning self-aligning electrical connectors with corresponding electrical connectors on the bracket of the pedestal lift such that the self-aligning electrical connectors and the corresponding electrical connectors on the bracket of the pedestal lift automatically mate when the contact block is mounted to the bracket of the pedestal lift.