Multi-Oscillator RF Generator for Plasma Processing
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Solution Overview
Problem
Current semiconductor processing systems require multiple independent RF generators for multi-frequency RF excitation, leading to increased complexity and costs due to the need for separate generators and matching networks for each frequency.
Innovation Solution
A single RF generator design that combines multiple mutually exclusive frequency oscillators with a switch control system, allowing for the selection and amplification of multiple frequencies, thereby eliminating the need for separate generators and simplifying the system.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Adaptability or versatility
If multiple independent RF generators are used for multi-frequency RF excitation, then the required frequency coverage is achieved, but the system complexity and cost increase due to multiple matching networks and generators
Solution Approach 1:
The patent combines multiple RF oscillators (operating at different frequencies) into a single RF generator unit. The generator includes a first oscillator for a first frequency and a second oscillator for a second frequency, both integrated within the same generator housing and control system. This merging eliminates the need for separate independent generators and their associated matching networks, directly reducing system complexity while maintaining multi-frequency capability.
Solution Approach 2:
The single RF generator is designed to perform multiple functions by incorporating multiple oscillators that can operate at different frequencies. The generator can selectively activate either the first oscillator or the second oscillator based on processing requirements, making it a universal device that replaces multiple specialized generators. This multi-functionality is controlled through a unified control system that manages both oscillators and the associated matching networks.
2Adaptability or versatility
If multiple independent RF generators are used for multi-frequency RF excitation, then the required frequency coverage is achieved, but the cost increases due to multiple generators and matching networks
Solution Approach 1:
The patent combines multiple RF oscillators (operating at different frequencies) into a single RF generator unit. The generator includes a first oscillator for a first frequency and a second oscillator for a second frequency, both integrated within the same generator housing and control system. This merging eliminates the need for separate independent generators and their associated matching networks, directly reducing system complexity while maintaining multi-frequency capability.
Solution Approach 2:
The single RF generator is designed to perform multiple functions by incorporating multiple oscillators that can operate at different frequencies. The generator can selectively activate either the first oscillator or the second oscillator based on processing requirements, making it a universal device that replaces multiple specialized generators. This multi-functionality is controlled through a unified control system that manages both oscillators and the associated matching networks.
3Device complexity
If a single RF generator combines multiple frequency oscillators, then the system complexity is reduced, but the requirement for mutual exclusivity of oscillators must be enforced
Solution Approach 1:
The patent introduces a switch as an intermediary component between the oscillators and the output stage. The switch is configured to selectively connect either the first oscillator or the second oscillator to the output, ensuring that only one oscillator operates at a time. This intermediary device automatically enforces the mutual exclusivity requirement, eliminating the need for complex control logic or manual intervention to prevent simultaneous oscillator operation.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This solution enables cost-efficient multi-frequency RF excitation in semiconductor processing by reducing the number of required generators and matching networks, while maintaining efficient power delivery to the processing chamber.
Implementation Method 1
The amplifier is configured to power amplify both of the first and second frequency signals from the first and second frequency oscillators
Data Source
AI summary
A radio frequency (RF) power supply is provided. The RF power supply includes a first frequency oscillator for generating a first frequency signal and a second frequency oscillator for generating a second frequency signal. Also provided is an amplifier and a first switch connected to an output of the first frequency oscillator and a second switch connected to an output of the second frequency oscillator. An output of the first switch and the second switch are connected to an input of the amplifier. Also provided is a switch control coupled to the first switch and the second switch. The switch control is configured to enable a connection via the first and second switches from only one of the first frequency oscillator or the second frequency oscillator to the amplifier at one time. The amplifier is configured to power amplify both of the first and second frequency signals from the first and second frequency oscillators.