RF Semiconductor Metal Layer Thickness for EMI Isolation

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Solution Overview

Problem

Advanced driver assistant systems (ADAS) RF semiconductor devices face increased electromagnetic interference (EMI) due to their smaller size and tighter packing, which degrades their performance and functionality.

Innovation Solution

A radio frequency (RF) semiconductor device with a metal layer external to the active chip region, where the metal layer's thickness is chosen to be at most 50% of the skin depth corresponding to the operating frequency range, enhancing absorption of RF signals over reflection and reducing EMI by increasing channel-to-channel isolation.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Productivity

If the size of RF semiconductor devices is reduced and components are tightly packed to improve integration, then device functionality and performance are enhanced, but electromagnetic interference between circuits and components increases

Engineering Contradiction:
Improvedevice integrationVSAvoidelectromagnetic interference
Core Design Contradiction:
ProductivityVSObject-affected harmful factors

Solution Approach 1:

A metal layer is introduced as an intermediary element between RF signal paths and other components. This metal layer acts as a mediator that absorbs electromagnetic energy and prevents direct interference between adjacent circuits, allowing high-density integration while maintaining signal integrity.

Inventive Principle:
Principle #24Intermediary (Mediator)

Solution Approach 2:

The invention converts the harmful electromagnetic radiation into beneficial absorbed energy by using a metal layer with specific thickness (at most 50% of skin depth). The metal layer absorbs the electromagnetic energy that would otherwise cause interference, transforming the harmful EMI into heat energy that is dissipated safely.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

2Object-affected harmful factors

If a metal layer is added to reduce electromagnetic interference, then channel isolation is improved, but device complexity and manufacturing steps increase

Engineering Contradiction:
Improvechannel isolationVSAvoidmanufacturing complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The invention optimizes the metal layer thickness parameter to be at most 50% of the skin depth of the metal material at the operating frequency. This specific parameter range achieves effective EMI shielding while minimizing the amount of metal material required and reducing manufacturing complexity compared to thicker shielding layers.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

Instead of using a complete skin depth thickness of metal layer, the invention applies a partial thickness (at most 50% of skin depth) which provides sufficient EMI protection for the specific application requirements. This partial action reduces material usage and manufacturing complexity while achieving the necessary channel isolation.

Inventive Principle:
Principle #16Partial or excessive action

3Object-affected harmful factors

If a metal layer with thickness at most 50% of skin depth is used to absorb RF signals, then electromagnetic interference is reduced, but the amount of metal material is limited

Engineering Contradiction:
Improveelectromagnetic interference reductionVSAvoidmetal layer thickness
Core Design Contradiction:
Object-affected harmful factorsVSQuantity of substance

Solution Approach 1:

The invention changes the thickness parameter of the metal layer to be at most 50% of the skin depth, which is sufficient to absorb RF signals and reduce EMI while minimizing metal material consumption. This parameter optimization balances EMI protection effectiveness with material efficiency.

Inventive Principle:
Principle #35Parameter changes

Solution Approach 2:

The metal layer is applied selectively in specific locations where EMI protection is most needed, rather than uniformly across the entire device. This localized application reduces the total quantity of metal material required while maintaining effective EMI reduction at critical interfaces between RF channels and other components.

Inventive Principle:
Principle #3Local quality

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This configuration effectively reduces electromagnetic interference among RF channels, improving the performance of RF semiconductor devices by increasing absorption of RF signals and minimizing reflection, while also reducing the amount of metal used, thus enhancing channel isolation and operational efficiency.

Implementation Method 1

the metal layer has a thickness that is a skin depth corresponding to the operating frequency range

Methodology Applied
Scientific EffectSkin effect: Skin Effect

Data Source

PatentUS20240429177A1Radio frequency semiconductor device and method for fabricating a radio frequency semiconductor device
Publication Date: 2024.12.26 INFINEON TECHNOLOGIES AG
  • US20240429177A1 patent drawing
  • US20240429177A1 patent drawing
  • US20240429177A1 patent drawing

AI summary

According to an example of the implementation, a radio frequency (RF) semiconductor device to process RF signals in an operating frequency range including a semiconductor chip including a first surface, a second surface, sidewalls and an active chip region. The first surface and second surface extend along a lateral direction and the sidewalls extend along a vertical direction. A metal layer external to the active chip region faces the second surface of the semiconductor chip. The metal layer has a thickness that is below a skin depth corresponding to the operating frequency range.