Packaged RF Module with Air Cavity for Mixed-Die Integration

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Solution Overview

Problem

High performance RF communication systems, particularly those for high frequency and rugged applications, face challenges in effectively integrating components with different structures and behaviors, such as III-V semiconductor and silicon-based dies, due to differing packaging preferences and the degradation of performance from encapsulating materials.

Innovation Solution

A packaged RF module design that includes a package substrate with contact pads, multiple dies (RF switch and amplifier) attached to the substrate, an encapsulating material to protect electrical connections, and an air cavity with an encapsulant flow limiter, allowing for differential packaging of III-V and silicon-based dies to maintain high performance while preventing encapsulant bleeding.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If encapsulating material is used to protect electrical connections, then reliability is improved, but dielectric loss and performance degradation occur

Engineering Contradiction:
Improveprotection of electrical connectionsVSAvoiddielectric loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The encapsulation is segmented into two zones: a first encapsulating material covers the RF switch die and its connections, while a second encapsulating material covers the RF amplifier die and its connections. This segmentation allows different material properties to be used for different components, optimizing both protection and performance.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

Different encapsulating materials with different dielectric properties are used for different dies. The first encapsulating material is optimized for the RF switch, while the second encapsulating material is optimized for the RF amplifier, allowing each component to operate in its optimal electromagnetic environment.

Inventive Principle:
Principle #3Local quality

2Adaptability or versatility

If multiple different technology dies are integrated, then functionality is improved, but manufacturing complexity increases

Engineering Contradiction:
Improveintegration of mixed technology diesVSAvoidpackaging structure complexity
Core Design Contradiction:
Adaptability or versatilityVSDevice complexity

Solution Approach 1:

The package substrate serves multiple functions: it provides mechanical support, electrical interconnections between dies, thermal management pathways, and structural integration for the air cavity. This multi-functionality reduces the need for additional components and simplifies the overall manufacturing process.

Inventive Principle:
Principle #6Universality (Multi-functionality)

Solution Approach 2:

Multiple dies from different technology nodes (III-V semiconductor and silicon-based) are merged onto a single package substrate with different orientations. The RF switch die and RF amplifier die are integrated in close proximity with optimized signal paths, reducing interconnect complexity.

Inventive Principle:
Principle #5Merging (Combining)

3Reliability

If air cavity is created for differential packaging, then performance is improved, but manufacturing precision requirements increase

Engineering Contradiction:
Improvehigh frequency performanceVSAvoidair cavity formation precision
Core Design Contradiction:
ReliabilityVSManufacturing precision

Solution Approach 1:

The air cavity structure is pre-designed into the package substrate with defined cavities and chambers. The substrate includes integrated features such as raised portions, recesses, and sealed chambers that guide the formation of air cavities during the packaging process, reducing the precision requirements for subsequent assembly steps.

Inventive Principle:
Principle #10Preliminary action

Data Source

PatentEP3557613B1Radio frequency module
Publication Date: 2023.12.27 ANALOG DEVICES INC
  • EP3557613B1 patent drawingFigure 1
  • EP3557613B1 patent drawingFigure 2
  • EP3557613B1 patent drawingFigure 3

AI summary

A packaged radio frequency (RF) module is disclosed. The module can include a substrate, a first die electrically and mechanically attached to the substrate, a second die electrically and mechanically attached to the substrate, an encapsulating material, and a lid attached to the substrate. The first die comprises a silicon-based die, such as an RF switch die, and the second die comprises a compound semiconductor die, such as an RF amplifier. The encapsulating material can protect electrical connections between the first die and the substrate. The substrate and the lid at least partially define an air cavity within which the first and the second die are mounted. An active surface of the second die is exposed to the air cavity.