RF Power Calibration Using In-Situ Closed-Loop Current Sensing
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Solution Overview
Problem
The existing RF power generator calibration process is time-consuming and labor-intensive, requiring disconnection and reconnection of the connection line, which increases the risk of equipment damage and costs.
Innovation Solution
An RF power measurement device that allows for in-situ calibration without disconnecting the connection line, using a magnetic field sensor, calibration device, and analysis device to measure and adjust the RF power externally, eliminating the need for a separate calibration loop.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If the connection line is disconnected and reconnected to a separate calibration loop for RF power generator calibration, then the calibration can be performed, but the process becomes time-consuming and labor-intensive
Solution Approach 1:
A current sensor is introduced as an intermediary component that can be electromagnetically coupled to the connection line without requiring physical disconnection. This intermediary device enables calibration measurements while the connection line remains connected to the plasma processing tool, thus eliminating the time-consuming disconnection and reconnection steps.
Solution Approach 2:
The patent replaces the mechanical disconnection and physical reconnection process with an electromagnetic coupling approach. The current sensor uses electromagnetic induction to measure RF current through the connection line without physical contact or disconnection, substituting a mechanical operation with an electromagnetic field-based measurement.
2Measurement precision
If the connection line is disconnected and reconnected for calibration, then power calibration can be achieved, but the risk of equipment damage increases
Solution Approach 1:
The current sensor acts as a non-intrusive intermediary that measures RF current through electromagnetic coupling without requiring physical disconnection of the connection line. This eliminates the repeated plugging and unplugging operations that pose risks of equipment damage, while still enabling accurate calibration measurements.
Solution Approach 2:
The system enables self-calibration by continuously monitoring RF power parameters through the electromagnetic coupling mechanism. The calibration can be performed in-situ without external intervention or disconnection, allowing the system to self-adjust and maintain accuracy while minimizing human handling and potential damage risks.
3Measurement precision
If a separate calibration loop is used for RF power generator calibration, then calibration can be performed, but labor intensity increases
Solution Approach 1:
The current sensor serves as an automated intermediary that continuously monitors RF current through electromagnetic coupling. This eliminates the need for manual disconnection, connection to separate calibration equipment, and reconnection steps, thereby reducing labor intensity while maintaining calibration accuracy.
Solution Approach 2:
The electromagnetic coupling mechanism allows calibration measurements to be taken continuously without interruption to the connection line or plasma processing operations. This continuous measurement capability eliminates the need for separate calibration loops and manual intervention, significantly reducing labor intensity.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This approach reduces calibration time, decreases the risk of equipment damage, and enhances production efficiency by allowing continuous operation of the connection line, thereby improving the matching rate and reducing costs.
Implementation Method 1
a current sensor configured to be electromagnetically coupled to a path between a RF power generator and a process chamber
Data Source
AI summary
The present disclosure is directed to an in situ closed-loop radio frequency (RF) power management on RF processes such as a plasma etch process, a plasma chemical vapor deposition process, a plasma physical vapor deposition process, a plasma clean process, or the like. An RF power measurement device according to one or more embodiments of the present disclosure assists the in situ closed-loop RF power management on RF processes. In some embodiments, the RF power measurement device includes a coil-shaped current sensor that is wound around the path between an RF generator and a chamber. The coil-shaped current sensor senses the current flowing through this path so that the power of the RF generator may be calibrated without having to separate the RF generator for separate analysis and calibration. The RF power measurement device allows management of RF power in an in situ closed-loop manner.