RF Power Detector with Mutual Inductors for Precision Measurement
Find Innovative SolutionsGenerate Solutions
Solution Overview
Problem
Existing RF power detectors lack precision and consistency in power detection, particularly at smaller linewidths, leading to inaccuracies in semiconductor manufacturing processes, making it impossible to achieve thin linewidths in processes like 32 nm manufacturing.
Innovation Solution
A RF power supply with a precise power detector comprising a voltage mutual inductor, current mutual inductor, precise detecting module, and microcontroller, featuring an add circuit, subtraction circuit, rectification circuit, and filtering-amplifying circuit, utilizing Schottky diodes and high-speed operational amplifiers for accurate power measurement and impedance matching.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If existing RF power detector is used, then device complexity is reduced, but measurement precision deteriorates due to big dead-band and small dynamic range
Solution Approach 1:
The detector circuit is segmented into multiple functional modules: voltage mutual inductor, current mutual inductor, adding circuit, subtracting circuit, rectifying circuit, filtering-amplifying circuit, and microcontroller. Each module handles a specific aspect of the detection process, allowing for precise measurement while maintaining manageable complexity through modular design.
Solution Approach 2:
The detector employs dynamic signal processing with the multi-way switch that can selectively connect different circuits based on operating conditions. The filtering-amplifying circuit dynamically adjusts to handle signals across a wide power range, enabling the detector to adapt to varying RF power levels while maintaining precision.
2Manufacturing precision
If existing RF power detector is used, then ease of manufacture is improved, but manufacturing precision deteriorates leading to inability to achieve thin linewidth in semiconductor manufacturing
Solution Approach 1:
The detector provides precise feedback on RF power levels to the control system, enabling closed-loop control of the RF power supply. This feedback mechanism ensures that the actual power delivered matches the desired power, allowing for precise linewidth control in semiconductor manufacturing processes.
Solution Approach 2:
The detector is designed to accurately measure RF power across a wide range of parameters including different power levels, frequencies (2 MHz, 13.56 MHz, 27.12 MHz), and impedance conditions. By accommodating parameter variations, the detector enables precise manufacturing control without requiring multiple specialized devices.
3Reliability
If existing RF power detector is used, then device complexity is reduced, but reliability deteriorates due to large errors in small RF power detection
Solution Approach 1:
The voltage and current signals are pre-processed through mutual inductors that provide impedance matching and signal transformation before entering the detection circuits. This preliminary action ensures that signals are properly conditioned for accurate measurement, improving reliability before the actual detection occurs.
Solution Approach 2:
The detector replaces mechanical or simple electronic detection methods with electromagnetic induction-based measurement using mutual inductors. This substitution enables non-contact, high-precision measurement of voltage and current, improving reliability while reducing mechanical wear and contact errors.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
The solution provides high-precision RF power detection with a wide dynamic range and small dead-band, ensuring accurate control of output power and enabling successful semiconductor manufacturing processes at smaller linewidths.
Implementation Method 1
the voltage mutual inductor and the current mutual inductor are respectively connected to the precise detecting module
Implementation Method 2
the rectification circuit comprises a rectifying operational amplifier and detecting diodes
Data Source
AI summary
A radio frequency (RF) power source having a precise power detector includes a RF signal generator, a RF power amplifying circuit, a power supply circuit, and a precise power detector. The precise power detector includes a voltage mutual inductor, a current mutual inductor, a precise detecting module, and a microcontroller integrated with an analog-digital (A/D) converter and a micro-processing unit, wherein the voltage mutual inductor and the current mutual inductor are respectively connected with the precise detecting module. The precise detecting module includes an add circuit, a subtraction circuit, a rectification circuit, and a filtering-amplifying circuit, wherein the add circuit and the subtraction circuit are respectively connected with the rectification circuit, the rectification circuit connects to the filtering-amplifying circuit, the filtering-amplifying circuit connects to the microcontroller integrated with the A/D converter and the micro-processing unit.