RF Power Supply Impedance Matching via Phase-Directed Frequency Sweep

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Solution Overview

Problem

Conventional RF power supply devices face challenges in efficiently matching impedance due to abrupt variations, leading to prolonged detection times for minimizing the reflection coefficient and reflected power during frequency sweep.

Innovation Solution

The RF power supply device employs a two-stage control method, determining the frequency sweep direction based on phase states to minimize the reflection coefficient and reflected power, and includes a recontrol mechanism to adjust frequency when impedance changes, using phase detection and reflection coefficient analysis to optimize impedance matching.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If frequency sweep is performed within a predetermined frequency range to minimize the reflection coefficient, then impedance matching is achieved, but the detection time is prolonged

Engineering Contradiction:
Improveimpedance matchingVSAvoiddetection time
Core Design Contradiction:
ReliabilityVSLoss of time

Solution Approach 1:

The patent applies preliminary action by using phase detection to determine the frequency sweep direction before performing the full frequency sweep. The phase detector detects the phase of the reflection coefficient, and based on this phase information, the system pre-determines whether to sweep frequency upward or downward, thereby avoiding the need to sweep through the entire frequency range and significantly reducing detection time while still achieving impedance matching

Inventive Principle:
Principle #10Preliminary action

2Use of energy by moving object

If conventional matching circuit is used for impedance matching, then power supply efficiency is improved, but the system cannot respond to abrupt impedance variation

Engineering Contradiction:
Improvepower supply efficiencyVSAvoidresponse speed to impedance variation
Core Design Contradiction:
Use of energy by moving objectVSSpeed

Solution Approach 1:

The patent applies dynamics by making the frequency variable and adjustable in real-time based on load impedance changes. Instead of using a fixed matching circuit, the system dynamically adjusts the operating frequency according to detected phase information, enabling rapid response to abrupt impedance variations while maintaining power supply efficiency through continuous optimization of the matching condition

Inventive Principle:
Principle #15Dynamics

3Reliability

If frequency control is repeated when reflection coefficient exceeds upper limit, then impedance matching is maintained, but the control complexity increases

Engineering Contradiction:
Improveimpedance matching maintenanceVSAvoidcontrol complexity
Core Design Contradiction:
ReliabilityVSDevice complexity

Solution Approach 1:

The patent applies feedback by continuously monitoring the phase of the reflection coefficient and using this information to control the frequency sweep direction. The phase detector provides real-time feedback about the impedance state, and the frequency controller adjusts the operating frequency based on this feedback, creating a closed-loop control system that maintains impedance matching with simpler control logic compared to repeated full sweeps

Inventive Principle:
Principle #23Feedback

Data Source

PatentEP3481160B1High-frequency power supply device, and control method for high-frequency power supply device
Publication Date: 2020.11.25 KYOSAN ELECTRIC MFG CO LTD
  • EP3481160B1 patent drawingFigure 1
  • EP3481160B1 patent drawingFigure 2
  • EP3481160B1 patent drawingFigure 3

AI summary

In frequency control where impedance matching is performed by frequency sweep in an RF power supply device, a frequency sweep direction is specified, allowing a reflection coefficient and/or reflected power to move to a minimum, whereby it is possible to reduce a time length required until detecting the frequency that enables the reflection coefficient and/or the reflected power to be minimized. The frequency control for impedance matching in the RF power supply device is performed according to the following two-stage control; A) phase control that specifies the frequency sweep direction that allows the reflection coefficient and/or the reflected power to move to a minimum, based on the phase state of oscillating frequency, and that starts increasing or decreasing the frequency in thus specified sweep direction; and B) reflected power control where the reflection coefficient or the reflection amount is used as a control end condition for completing the frequency control.