RF Power Source Voltage Divider Switching for Dual Cathode Plasma
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Solution Overview
Problem
The existing radio frequency power source devices for dual cathodes systems face challenges in downsizing and cost reduction due to the need for two separate power sources, and they struggle to deliver voltage outputs with different values (high and low) as required for plasma ignition and maintenance, resulting in insufficient voltage for plasma ignition and voltage reduction issues.
Innovation Solution
A radio frequency power source device with a voltage divider configuration that uses capacitive elements connected in series, allowing for switching between high and low voltage outputs by changing the connection state with respect to ground potential, enabling selective delivery of high or low voltage values without reducing the output voltage.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If two separate radio frequency power sources are used for dual cathodes, then each electrode can receive appropriate voltage, but device size and production cost increase
Solution Approach 1:
The patent segments the voltage delivery function by using a single radio frequency power source combined with a voltage divider circuit that includes switching elements. This allows the system to deliver different voltages to different electrodes through circuit segmentation rather than requiring separate power sources, thereby reducing device complexity while maintaining reliability
Solution Approach 2:
The patent makes a single radio frequency power source universal by combining it with a voltage divider and switching circuitry that enables it to deliver multiple voltage levels to different electrodes. This multi-functionality approach allows one power source to replace what would traditionally require two separate power sources, reducing overall device complexity
2Adaptability or versatility
If voltage divider is used to deliver different voltage values, then plasma ignition and maintenance can be supported, but voltage reduction occurs at output ends
Solution Approach 1:
The patent applies dynamics by using switching elements that can dynamically change the connection state of the voltage divider circuit. This allows the system to switch between different voltage division ratios in real-time, enabling adaptive voltage delivery for different operational phases (ignition and maintenance) while managing voltage levels appropriately
Solution Approach 2:
The patent employs periodic action through time-sequential voltage delivery, where the switching circuit alternates between different voltage division configurations during plasma ignition and maintenance phases. This periodic switching allows the system to deliver high voltage during ignition and appropriate lower voltage during maintenance, addressing both requirements through temporal separation
3Adaptability or versatility
If switching between high and low voltage outputs is implemented, then plasma ignition and maintenance requirements are met, but device complexity increases
Solution Approach 1:
The patent merges the voltage switching function with the existing voltage divider circuit by integrating switching elements directly into the voltage division structure. This combination approach allows voltage switching capability to be achieved without adding completely separate switching circuits, thereby limiting the increase in device complexity while still providing the necessary adaptability
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
This configuration allows for the delivery of different voltage values as needed, preventing voltage reduction and ensuring sufficient high voltage for plasma ignition while maintaining low voltage for plasma maintenance, thus addressing the limitations of existing systems.
Implementation Method 1
a voltage divider 4 for dividing the radio frequency voltage delivered from the radio frequency output circuit 3 into AC voltage outputs in antiphase with each other with respect to a ground potential
Data Source
Figure 1A~1C
Figure 2A~2D
Figure 3A~3C
AI summary
In radio frequency power source devices for delivering AC voltage outputs in antiphase with each other, having a configuration to divide the voltage output from a radio frequency output circuit into two, it is not possible to perform switching as appropriate, between different voltage values, high voltage and low voltage, resulting in that the voltage at an output end is reduced to have a half peak value of the voltage output of the radio frequency output circuit. There is provided a radio frequency power source device configured to change a voltage ratio between two output end voltages, by switching a connection state of a voltage divider that divides the radio frequency voltage, in such a manner that the radio frequency voltage is divided into voltage outputs in antiphase with each other with respect to ground potential, and high voltage and low voltage are delivered in switching manner. Switching of the connection state in the voltage divider enables selective delivery of voltage having different values, high voltage or low voltage, and by selecting and delivering high voltage for the time high voltage is required, reduction of the voltage output from the radio frequency output circuit is prevented.