RF Sensor Clamp Assembly Surface Mounting
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Solution Overview
Problem
Conventional RF sensors for plasma reactors add electrical length to the RF current carrier, requiring physical disruption and recalibration due to harmonic distortion issues in plasma processes, especially at high frequencies like megahertz ranges.
Innovation Solution
A novel clamp assembly that attaches RF sensors to the outer surface of the RF current carrier without adding electrical length, using wedge inserts and fasteners to securely grip the carrier, allowing for accurate measurements without modifying the RF power attributes.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional RF sensors are installed by physically disrupting and reconnecting the current carrier, then the sensor can be brought into electrical contact with the RF current carrier, but the electrical length of the current carrier increases, causing significant capacitance increase and phase angle shift at megahertz frequencies
Solution Approach 1:
The patent transitions from series integration (adding sensor in-line with current carrier) to surface mounting (attaching sensor to outer surface of current carrier). This dimensional change allows the sensor to couple with the RF signal without adding to the electrical length of the current carrier path, thereby avoiding phase angle shifts and capacitance changes while maintaining measurement capability.
Solution Approach 2:
The patent introduces a clamp assembly with conductive elements as an intermediary between the sensor and the RF current carrier. This intermediary provides electrical contact without requiring physical disruption of the current carrier, allowing the sensor to measure RF parameters while the current carrier maintains its original electrical length and characteristics.
2Measurement precision
If conventional RF sensors are installed by physically disrupting the current carrier, then the sensor can be integrated into the system, but additional current carrier must be added to avoid interference and allow proper grounding, complicating installation and requiring recalibration
Solution Approach 1:
By moving the sensor installation from the internal current path to the outer surface, the patent eliminates the need to add additional current carrier segments for grounding and interference avoidance. The surface mounting approach simplifies the overall system configuration while maintaining measurement accuracy.
Solution Approach 2:
The clamp assembly serves as an intermediary that provides both electrical contact for measurement and mechanical support, eliminating the need for additional current carrier additions and complex grounding arrangements required by conventional intrusion-based installation methods.
3Ease of operation
If conventional RF sensors add electrical length to the current carrier, then the sensor can be installed, but the phase angle shifts and calibration coefficients become inaccurate, requiring recalibration
Solution Approach 1:
The surface mounting approach allows easy sensor installation without adding electrical length to the current carrier path. Since the sensor does not become part of the current carrier's electrical path, the original calibration coefficients remain accurate and no recalibration is needed, maintaining both ease of operation and calibration reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of RF frequencies without altering the RF current carrier's characteristics, reducing the need for recalibration and minimizing parasitic capacitance, especially in high-frequency applications.
Implementation Method 1
using wedge inserts and fasteners to securely grip the carrier
Data Source
AI summary
A clamp assembly for bringing an RF sensor into electrical contact with an RF current carrier is provided herein. The clamp assembly (101) comprises a first wedge-shaped element (103), and a second wedge-shaped element (105) which is slidingly engaged with said first wedge-shaped element. Preferably, the clamp assembly also comprises a collar (113) within which the first and second wedge-shaped elements are disposed. The clamp assembly preferably further comprises a fastener (111), such as a screw, which adjoins the first and second elements, in which case the clamp assembly is adapted such that, as the screw is rotated in a first direction, at least one of the first and second elements expands against the collar and/or the RF current carrier.