RF Sensor Clamp Assembly for Plasma Reactors
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Solution Overview
Problem
Conventional RF sensors for plasma reactors add physical and electrical length to the RF current carrier, requiring recalibration and modifications to compensate for harmonic distortion, which complicates installation and affects process control in high-frequency applications.
Innovation Solution
A novel clamp assembly that attaches the RF sensor to the outer surface of the RF current carrier without adding electrical length, allowing for accurate measurement of RF power attributes without modifying the current carrier's characteristics, using a sliding wedge mechanism and heterodyne circuitry for signal analysis.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If conventional RF sensors are used, then RF power attributes can be measured, but the electrical length of the current carrier increases requiring recalibration
Solution Approach 1:
The patent introduces an intermediary coupling mechanism between the sensor and the current carrier. The sensor is coupled to a pickup coil that inductively couples to the current carrier, allowing measurement without direct electrical connection. This intermediary coupling approach enables RF power attribute measurement while avoiding the addition of electrical length to the current carrier.
2Measurement precision
If conventional RF sensors are added to the system, then measurement capability is provided, but additional current carrier is required to avoid interference and ensure proper grounding
Solution Approach 1:
The sensor assembly serves as an intermediary device that couples inductively to the current carrier through a pickup coil, eliminating the need for additional current carrier segments. This approach provides measurement capability while maintaining system configuration simplicity by avoiding the need to rearrange components or add grounding structures.
3Ease of manufacture
If the current carrier is physically disrupted and reconnected at sensor terminals, then the sensor can be installed, but physical and electrical length is added to the current carrier
Solution Approach 1:
The sensor assembly acts as an intermediary that couples inductively to the current carrier without requiring physical disruption or reconnection of the carrier itself. The pickup coil captures the RF magnetic field around the current carrier, enabling sensor installation while preserving the original electrical length and continuity of the current carrier.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables precise measurement of RF power attributes without altering the current carrier's electrical length, reducing recalibration needs and parasitic capacitance, and maintaining process control in high-frequency plasma reactors.
Implementation Method 1
The clamp assembly includes a first and second wedge-shaped element that can be slidingly engaged by a fastener
Implementation Method 2
The sensor utilizes a novel clamp assembly that enables the sensor to be readily attached to the outer surface of an RF current carrier... allowing for accurate measurement of RF power attributes
Data Source
AI summary
A clamp assembly for bringing an RF sensor into electrical contact with an RF current carrier is provided herein. The clamp assembly (101) comprises a first wedge-shaped element (103), and a second wedge-shaped element (105) which is slidingly engaged with said first wedge-shaped element. Preferably, the clamp assembly also comprises a collar (113) within which the first and second wedge-shaped elements are disposed. The clamp assembly preferably further comprises a fastener (111), such as a screw, which adjoins the first and second elements, in which case the clamp assembly is adapted such that, as the screw is rotated in a first direction, at least one of the first and second elements expands against the collar and/or the RF current carrier.