On-Chip RF Shielding Cage for SoC EMI Reduction

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Solution Overview

Problem

The integration of multiple components on a single chip in semiconductor devices leads to interference from RF circuitry's electromagnetic radiation, which worsens with increasing operating frequencies and decreasing distances, posing a challenge to eliminate without significant production cost increases.

Innovation Solution

A conductive cage is integrated on-chip to enclose RF components, using low-resistance materials like copper, aluminum, and gold to form a Faraday cage structure that minimizes electromagnetic radiation interference with adjacent components.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Adaptability or versatility

If multiple components are integrated on a single chip, then device functionality and density are improved, but electromagnetic radiation interference between components increases

Engineering Contradiction:
Improvedevice functionalityVSAvoidelectromagnetic radiation interference
Core Design Contradiction:
Adaptability or versatilityVSObject-affected harmful factors

Solution Approach 1:

The chip is divided into distinct regions: an RF region containing RF components and a non-RF region containing other components. A conductive cage structure segments the RF region from the non-RF region, physically separating the sources and victims of electromagnetic interference while allowing both regions to coexist on the same chip.

Inventive Principle:
Principle #1Segmentation

Solution Approach 2:

A conductive cage acts as an intermediary structure between RF components and non-RF components. This cage serves as a Faraday shield that blocks electromagnetic radiation from the RF region from reaching non-RF components, mediating the interaction between the two regions and preventing harmful interference.

Inventive Principle:
Principle #24Intermediary (Mediator)

2Object-affected harmful factors

If RF components are shielded with conductive cages, then electromagnetic radiation interference is reduced, but manufacturing complexity increases

Engineering Contradiction:
Improveelectromagnetic radiation interferenceVSAvoidmanufacturing complexity
Core Design Contradiction:
Object-affected harmful factorsVSDevice complexity

Solution Approach 1:

The conductive cage structure is merged with the existing chip fabrication process. The cage is formed using the same semiconductor manufacturing techniques as the surrounding circuitry, integrating the shielding function into the standard production flow rather than requiring separate, complex assembly steps.

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The conductive cage structure serves multiple functions: it provides electromagnetic shielding, acts as a ground reference, and can be integrated with existing chip interconnect layers. This multi-functionality reduces the need for additional dedicated structures and simplifies the overall manufacturing process.

Inventive Principle:
Principle #6Universality (Multi-functionality)

3Speed

If operating frequencies are increased, then device performance is improved, but electromagnetic radiation interference worsens

Engineering Contradiction:
Improveoperating frequencyVSAvoidelectromagnetic radiation interference
Core Design Contradiction:
SpeedVSObject-affected harmful factors

Solution Approach 1:

The conductive cage structure converts the harmful high-frequency electromagnetic radiation into beneficial ground-referenced signals. By providing a low-impedance path to ground, the cage dissipates RF energy safely and prevents it from interfering with other components, effectively managing the increased radiation from high-speed operation.

Inventive Principle:
Principle #22Blessing in disguise (Convert harm into benefit)

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach effectively shields RF circuitry's electromagnetic radiation, reducing interference between components without increasing production costs, as the RF shield is integrated on-chip and fabricated using shared manufacturing processes, maintaining minimal noise generation and immunity to received noise.

Implementation Method 1

a conductive cage enclosing the RF component

Methodology Applied
Scientific EffectFaraday cage: Faraday Cage

Data Source

PatentUS8748287B2System on a chip with on-chip RF shield
Publication Date: 2014.06.10 INFINEON TECHNOLOGIES AG
  • US8748287B2 patent drawing
  • US8748287B2 patent drawing
  • US8748287B2 patent drawing

AI summary

Structures of a system on a chip are disclosed. In one embodiment, the system on a chip (SoC) includes an RF component disposed on a first part of a substrate, a semiconductor component disposed on a second part of the substrate, the semiconductor component and the RF component sharing a common boundary, and a conductive cage disposed enclosing the RF component. The conductive cage shields the semiconductor component from electromagnetic radiation originating from the RF circuit.