Wireless RF Signal Detection for Semiconductor Manufacturing
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Solution Overview
Problem
In semiconductor manufacturing, the transmission of RF signals is critical for processes like PECVD, but existing systems lack effective detection methods for strap or deterioration in the RF signal path, which can lead to unreliable semiconductor processes.
Innovation Solution
An electromagnetic detection device using induction coils to sense RF signals wirelessly, converting them into DC signals for processing by a controller to determine the normalcy of the semiconductor process, and triggering an interlock alarm to stop the process if abnormalities are detected, ensuring high reliability and safety.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Reliability
If RF signals are transmitted through the semiconductor manufacturing system, then the semiconductor process can be performed, but strap or deterioration in the circuit may occur leading to unreliable process transmission
Solution Approach 1:
The patent replaces direct electrical contact measurement with electromagnetic induction-based wireless measurement. Induction coils generate magnetic fields that couple with the RF signal path without physical contact, eliminating the need for additional circuit connections and reducing circuit complexity while improving reliability.
Solution Approach 2:
The patent introduces induction coils as an intermediary element between the RF signal path and the measurement system. These coils act as a magnetic field mediator that transfers information about the RF signal state without requiring direct electrical connection, thus avoiding circuit complexity increases.
2Reliability
If existing detection methods are used, then the system structure remains simple, but strap or deterioration in the RF signal path cannot be detected promptly
Solution Approach 1:
The patent replaces traditional electrical contact-based detection methods with electromagnetic induction-based wireless detection. Induction coils sense the RF signal through magnetic field coupling, enabling prompt detection of signal abnormalities without the complexity of direct circuit integration.
Solution Approach 2:
The patent implements a feedback mechanism where the induction coils continuously monitor the RF signal state and provide real-time information to the controller. When abnormalities such as strap or deterioration are detected, the system provides immediate feedback to halt the semiconductor process, ensuring high reliability.
3Reliability
If induction coils are used to sense RF signals wirelessly, then detection reliability improves, but the system requires additional components
Solution Approach 1:
The patent designs the induction coils to serve multiple functions: they generate the magnetic field for wireless coupling, sense the RF signal state, and provide spatial positioning information. This multi-functionality reduces the need for separate detection components, offsetting the added complexity with functional consolidation.
Solution Approach 2:
The induction coils act as an intermediary that bridges the RF signal path and the control system without requiring direct integration. This modular approach allows the detection system to be added independently, managing complexity through clear functional separation while maintaining high detection reliability.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables prompt detection of RF signal abnormalities, preventing process failures by wirelessly sensing RF signals with low power induction coils, ensuring reliable semiconductor manufacturing by identifying and halting abnormal processes.
Implementation Method 1
sense a RF signal and generate a sensing RF signal by electromagnetic induction of the induction coil
Implementation Method 2
convert the sensing RF signal into a DC signal
Data Source
AI summary
An electromagnetic detection device is provided. The electromagnetic detection device includes an induction coil, a converter, and a controller. The induction coil is utilized to sense an RF signal and generate a sensing RF signal by electromagnetic induction of the induction coil which is proportional to the RF signal. The RF signal is transmitted to a shower head to perform a semiconductor process on a wafer for manufacturing an IC in association with the RF signal. The converter is utilized to convert the sensing RF signal into a DC signal. The controller is utilized to determine whether the semiconductor process is normal or abnormal according to the DC signal during the semiconductor process. The semiconductor process will be terminated when the semiconductor process is determined as abnormal.