RF Switch Redistribution Layer Inductance for Lower Insertion Loss

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Solution Overview

Problem

Existing radio-frequency (RF) switches face challenges due to parasitic capacitance, which leads to increased insertion loss and higher implementation costs, particularly in flip chip devices where external inductors are used to compensate for this capacitance.

Innovation Solution

Implementing a redistribution layer (RDL) inductance within the semiconductor chip to provide a selected inductance that compensates for parasitic capacitance, reducing insertion loss and eliminating the need for external inductors.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Loss of energy

If external inductors are used to compensate for parasitic capacitance, then the insertion loss is reduced, but the device complexity and cost increase

Engineering Contradiction:
Improveinsertion lossVSAvoiddevice complexity
Core Design Contradiction:
Loss of energyVSDevice complexity

Solution Approach 1:

The patent merges the inductor function with the existing redistribution layer structure. The signal path is routed through the redistribution layer to create an inductance effect, combining the electrical connection function with the inductance compensation function in a single integrated structure, thereby eliminating external inductors and reducing device complexity

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The redistribution layer is designed to serve multiple functions: it provides electrical connections between different layers and simultaneously provides the required inductance for parasitic capacitance compensation. This multi-functionality eliminates the need for separate external inductor components

Inventive Principle:
Principle #6Universality (Multi-functionality)

2Loss of energy

If external inductors are used to compensate for parasitic capacitance, then the insertion loss is reduced, but the manufacturing cost increases

Engineering Contradiction:
Improveinsertion lossVSAvoidmanufacturing cost
Core Design Contradiction:
Loss of energyVSEase of manufacture

Solution Approach 1:

The inductor function is merged into the redistribution layer that is already part of the standard semiconductor manufacturing process. By utilizing the existing layered structure and routing signals through specific paths in the redistribution layer, the patent eliminates the need for separate external inductor components, thereby reducing manufacturing cost

Inventive Principle:
Principle #5Merging (Combining)

Solution Approach 2:

The redistribution layer structure itself provides the inductance function without requiring external components. The signal path routing through the redistribution layer creates the necessary inductance effect, making the system self-sufficient and eliminating additional manufacturing steps for external inductor integration

Inventive Principle:
Principle #25Self-service

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

The RDL inductance reduces insertion loss by approximately 0.2 dB and achieves a Q value greater than 20, providing effective compensation for parasitic capacitance without increasing costs.

Implementation Method 1

The signal path has a first end electrically connected to the first node and a second end electrically connected to the second node, and is configured to provide a selected inductance

Methodology Applied
Scientific EffectInductance: Inductor

Implementation Method 2

the selected inductance compensates for some or all of parasitic capacitance associated with the switching circuit

Methodology Applied
Scientific EffectParasitic capacitance: Parasitic Capacitance

Data Source

PatentUS12376341B2Radio-frequency switch having redistribution layer inductance
Publication Date: 2025.07.29 SKYWORKS SOLUTIONS INC
  • US12376341B2 patent drawing
  • US12376341B2 patent drawing
  • US12376341B2 patent drawing

AI summary

In some embodiments, a semiconductor chip device can include a semiconductor substrate having a switching circuit with a first node, and a plurality of layers configured to support the semiconductor substrate and to provide electrical connections for the switching circuit between a second node connectable to a location external to the semiconductor chip and the first node. The plurality of layers can include a redistribution layer, and a signal path can be implemented as a part of the redistribution layer. The signal path can have a first end electrically connected to the first node and a second end electrically connected to the second node, and be configured to provide a selected inductance.