RF Switch Transistors Optimized via Doping Profiles

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Solution Overview

Problem

RF switch branches in wireless devices face increased insertion loss due to higher resistance from stacking more transistors to handle voltage swings, and existing methods to adjust channel length do not linearly control transistor characteristics, leading to over-engineering and inefficient voltage handling.

Innovation Solution

Fabricating transistors with different dopant concentrations in channel regions to achieve varying on-resistances, breakdown voltages, and threshold voltages without relying on channel length differences, using techniques like body implants, LDD implants, and halo implants to customize transistor characteristics for specific operating conditions in RF switch branches.

Engineering Contradictions & Design Principles

VSEngineering Contradiction Analysis

1Reliability

If more transistors are stacked in the RF switch branch to support higher voltage swing, then the voltage handling capability is improved, but the resistance increases resulting in higher insertion loss

Engineering Contradiction:
Improvevoltage handling capabilityVSAvoidinsertion loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent applies local quality by differentiating transistor characteristics based on their position in the stack. Transistors at different locations (high side vs. low side) are engineered with different channel lengths and doping concentrations to match the local voltage and current conditions, optimizing performance while minimizing overall insertion loss.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes physical parameters of transistors including channel length, doping concentration, and device geometry to optimize performance. By varying these parameters across different transistor positions in the stack, the design achieves better voltage handling with reduced resistance and insertion loss.

Inventive Principle:
Principle #35Parameter changes

2Reliability

If transistors with higher VDS voltage capability are used to handle voltage swings, then the voltage handling is improved, but the on-resistance increases resulting in higher insertion loss

Engineering Contradiction:
ImproveVDS voltage capabilityVSAvoidinsertion loss
Core Design Contradiction:
ReliabilityVSLoss of energy

Solution Approach 1:

The patent implements local quality by assigning different transistor specifications to different positions in the stack. High-side transistors handling higher voltages are designed with appropriate VDS ratings, while low-side transistors use optimized devices for their lower voltage conditions, preventing over-engineering and reducing overall insertion loss.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent avoids excessive action by not specifying all transistors with the highest possible VDS rating. Instead, each transistor is sized appropriately for its specific operating conditions, achieving sufficient voltage handling without the penalty of unnecessarily high on-resistance across all devices.

Inventive Principle:
Principle #16Partial or excessive action

3Loss of energy

If channel length is reduced to lower on-resistance, then the resistance is improved, but the voltage handling capability deteriorates

Engineering Contradiction:
Improveinsertion lossVSAvoidvoltage handling capability
Core Design Contradiction:
Loss of energyVSReliability

Solution Approach 1:

The patent applies local quality by using different channel lengths for transistors at different positions in the stack. Low-side transistors with lower voltage stress use shorter channels for reduced resistance, while high-side transistors handling higher voltages use longer channels to maintain adequate breakdown voltage, optimizing the overall trade-off.

Inventive Principle:
Principle #3Local quality

Solution Approach 2:

The patent changes the channel length parameter selectively across different transistor instances to balance resistance and voltage handling. This parameter optimization, combined with doping adjustments, achieves reduced insertion loss without compromising voltage handling capability.

Inventive Principle:
Principle #35Parameter changes

Applied Scientific Principles

This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.

Function Achieved in This Case

This approach allows for precise control of transistor characteristics, reducing over-engineering and insertion loss by optimizing transistors for high and low voltage ends of the RF switch branch, enhancing power handling and voltage management.

Implementation Method 1

Fabricating transistors with different dopant concentrations in channel regions to achieve varying on-resistances, breakdown voltages, and threshold voltages using techniques like body implants, LDD implants, and halo implants

Methodology Applied
Scientific EffectIon Implantation: Ion Implantation

Data Source

PatentUS10587233B2High power RF switches using multiple optimized transistors and methods for fabricating same
Publication Date: 2020.03.10 NEWPORT FAB LLC
  • US10587233B2 patent drawing
  • US10587233B2 patent drawing
  • US10587233B2 patent drawing

AI summary

An RF switch includes series-connected transistors having different threshold voltages, breakdown voltages and on-resistances, without relying on different channel lengths to provide these differences. A first set of transistors located near a power amplifier output are fabricated to have first channel regions with relatively high dopant concentrations. A second set of transistors located near an antenna input, are fabricated to have second channel regions with relatively low dopant concentrations. The first set of transistors can also include halo implants to increase the dopant concentrations in the first channel regions. Lightly doped drain (LDD) regions of the first set of transistors can have a lower dopant concentration (and be shallower) than LDD regions of the second set of transistors. Transistors in the first set have a relatively high on-resistance, a relatively high breakdown voltage and a relatively high threshold voltage, when compared with transistors in the second set.