RFID Sensor System for Automated Particle Counter Location Tracking
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Solution Overview
Problem
Particle counting devices in semiconductor manufacturing environments face inaccuracies when moved from one location to another, as existing methods rely on manual updates of device addresses, leading to potential user errors and incorrect contamination source identification.
Innovation Solution
A system utilizing RFID tags and readers, where transmitting sensors at fixed locations interact with receiving sensors on particle counters to automatically update the data source, ensuring accurate location reporting to a central database.
Engineering Contradictions & Design Principles
Engineering Contradiction Analysis
1Measurement precision
If manual updates of device addresses are used to track particle counter locations, then the system can identify contamination sources, but user errors occur and location accuracy deteriorates when devices are moved
Solution Approach 1:
The particle counter automatically updates its location information by reading RFID tags in its environment, eliminating the need for manual operator intervention. The device self-updates its location database entry by autonomously detecting RFID tag signals and transferring its identifier to the appropriate location record.
Solution Approach 2:
The manual mechanical process of updating location records is replaced by an automated electromagnetic field-based RFID system. The particle counter uses RFID readers to detect tags and automatically update location data, substituting human-operated mechanical updates with automated electronic detection and data transfer.
2Adaptability or versatility
If device addresses are used to identify particle counter locations, then initial location tracking is simple, but the system becomes inadequate when machines are moved to different locations
Solution Approach 1:
RFID tags serve as intermediaries between the particle counter and the location database. Instead of directly linking devices to locations through manual address updates, the RFID tags act as mediators that automatically convey location information to the system when detected by the particle counter's RFID reader.
Solution Approach 2:
The RFID tag system provides universal location identification that works across multiple locations and devices. A single RFID infrastructure supports unlimited location points and device movements, making the system adaptable to any reconfiguration without requiring device-specific customization.
3Reliability
If operators manually update location data before each measurement, then location information can be kept current, but this increases operational time and opportunity for errors
Solution Approach 1:
RFID tags are pre-placed at all possible measurement locations before the particle counter is deployed. This preliminary setup creates an automated location identification system that instantly recognizes the device's position upon arrival, eliminating the need for operators to perform location updates during each measurement sequence.
Solution Approach 2:
The system implements automatic feedback loops where the particle counter continuously reads RFID tags, detects its location, and updates its database entry autonomously. This closed-loop feedback mechanism ensures location data accuracy without requiring operator intervention or manual verification at each measurement point.
Applied Scientific Principles
This section explains which scientific principles are used to turn an abstract innovation direction into a practical engineering solution.
Function Achieved in This Case
Enables accurate and automated recording of particle contamination data, preventing user errors and ensuring correct identification of contamination sources even when devices are moved or misplaced.
Implementation Method 1
RFID tags and readers... transmitting sensor that would be placed at the location of interest, as well as a receiving sensor that would be placed on the particle counter itself
Data Source
AI summary
A system of identifying the source location that a particle counter is using to draw its data from. The present invention includes a transmitting sensor placed at the location of interest, and a receiving sensor placed on the particle-counter device. A receiving sensor communicates a new position when a particle counter is not replaced at its origination point.